Null test of aspheric surface based on digital phase-shift interferometer

Guoguo Kang; Jinghui Xie; Ping Su; Qiaofeng Tan; Guofan Jin

doi:10.1016/j.ijleo.2009.03.007

Null test of aspheric surface based on digital phase-shift interferometer

Guoguo Kang^*
, Jinghui Xie
, Ping Su
, Qiaofeng Tan
, Guofan Jin

^*Corresponding author for this work

Tsinghua University
Beijing Institute of Technology

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

In order to implement the null test of aspheric surfaces as simply as that of spherical ones in a commercial digital phase-shift interferometer, computer generated holograms (CGHs) that are composed of a main CGH, which produces the ideal aspheric wavefront, and an alignment CGH, which aids in calibration, were utilized. The principle of testing aspheric surface in an interferometer with CGHs is explained and critical aspects in designing, fabricating and calibrating CGHs are discussed in detail. Error analysis of the experimental results demonstrated that the uncertainty of the testing system is better than λ/10 (λ=0.6328 μm).

Original language	English
Pages (from-to)	1586-1590
Number of pages	5
Journal	Optik
Volume	121
Issue number	17
DOIs	https://doi.org/10.1016/j.ijleo.2009.03.007
Publication status	Published - Sept 2010
Externally published	Yes

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 3 Good Health and Well-being

Keywords

Aspheric surface
Diffraction gratings
Error analysis
Interferometry

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10.1016/j.ijleo.2009.03.007

Cite this

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title = "Null test of aspheric surface based on digital phase-shift interferometer",

abstract = "In order to implement the null test of aspheric surfaces as simply as that of spherical ones in a commercial digital phase-shift interferometer, computer generated holograms (CGHs) that are composed of a main CGH, which produces the ideal aspheric wavefront, and an alignment CGH, which aids in calibration, were utilized. The principle of testing aspheric surface in an interferometer with CGHs is explained and critical aspects in designing, fabricating and calibrating CGHs are discussed in detail. Error analysis of the experimental results demonstrated that the uncertainty of the testing system is better than λ/10 (λ=0.6328 μm).",

keywords = "Aspheric surface, Diffraction gratings, Error analysis, Interferometry",

author = "Guoguo Kang and Jinghui Xie and Ping Su and Qiaofeng Tan and Guofan Jin",

year = "2010",

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doi = "10.1016/j.ijleo.2009.03.007",

language = "English",

volume = "121",

pages = "1586--1590",

journal = "Optik",

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T1 - Null test of aspheric surface based on digital phase-shift interferometer

AU - Kang, Guoguo

AU - Xie, Jinghui

AU - Su, Ping

AU - Tan, Qiaofeng

AU - Jin, Guofan

PY - 2010/9

Y1 - 2010/9

N2 - In order to implement the null test of aspheric surfaces as simply as that of spherical ones in a commercial digital phase-shift interferometer, computer generated holograms (CGHs) that are composed of a main CGH, which produces the ideal aspheric wavefront, and an alignment CGH, which aids in calibration, were utilized. The principle of testing aspheric surface in an interferometer with CGHs is explained and critical aspects in designing, fabricating and calibrating CGHs are discussed in detail. Error analysis of the experimental results demonstrated that the uncertainty of the testing system is better than λ/10 (λ=0.6328 μm).

AB - In order to implement the null test of aspheric surfaces as simply as that of spherical ones in a commercial digital phase-shift interferometer, computer generated holograms (CGHs) that are composed of a main CGH, which produces the ideal aspheric wavefront, and an alignment CGH, which aids in calibration, were utilized. The principle of testing aspheric surface in an interferometer with CGHs is explained and critical aspects in designing, fabricating and calibrating CGHs are discussed in detail. Error analysis of the experimental results demonstrated that the uncertainty of the testing system is better than λ/10 (λ=0.6328 μm).

KW - Aspheric surface

KW - Diffraction gratings

KW - Error analysis

KW - Interferometry

UR - https://www.scopus.com/pages/publications/77955564983

U2 - 10.1016/j.ijleo.2009.03.007

DO - 10.1016/j.ijleo.2009.03.007

M3 - Article

AN - SCOPUS:77955564983

SN - 0030-4026

VL - 121

SP - 1586

EP - 1590

JO - Optik

JF - Optik

IS - 17

ER -

Null test of aspheric surface based on digital phase-shift interferometer

Abstract

UN SDGs

Keywords

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