Novel integrated MEMS horn antenna for terahertz applications

Yong Yuan*, Yong Liu, Xin Lv

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

6 Citations (Scopus)

Abstract

In this paper, a novel integrated horn antenna for terahertz applications is proposed in order to enhance the performance of planar antenna elements. The processing of this type horn antenna combines two different MEMS techniques, DRIE and wet etching. The structure of the horn includes two parts, pyramid horn back cavity and octagonal horn front cavity. There are many tunable parameters of the horn, so high performance terahertz antenna elements can be achieved by synthesizing these parameters.

Original languageEnglish
Title of host publication34th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2009
DOIs
Publication statusPublished - 2009
Event34th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2009 - Busan, Korea, Republic of
Duration: 21 Sept 200925 Sept 2009

Publication series

Name34th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2009

Conference

Conference34th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2009
Country/TerritoryKorea, Republic of
CityBusan
Period21/09/0925/09/09

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