TY - GEN
T1 - Novel integrated MEMS horn antenna for terahertz applications
AU - Yuan, Yong
AU - Liu, Yong
AU - Lv, Xin
PY - 2009
Y1 - 2009
N2 - In this paper, a novel integrated horn antenna for terahertz applications is proposed in order to enhance the performance of planar antenna elements. The processing of this type horn antenna combines two different MEMS techniques, DRIE and wet etching. The structure of the horn includes two parts, pyramid horn back cavity and octagonal horn front cavity. There are many tunable parameters of the horn, so high performance terahertz antenna elements can be achieved by synthesizing these parameters.
AB - In this paper, a novel integrated horn antenna for terahertz applications is proposed in order to enhance the performance of planar antenna elements. The processing of this type horn antenna combines two different MEMS techniques, DRIE and wet etching. The structure of the horn includes two parts, pyramid horn back cavity and octagonal horn front cavity. There are many tunable parameters of the horn, so high performance terahertz antenna elements can be achieved by synthesizing these parameters.
UR - http://www.scopus.com/inward/record.url?scp=72749095393&partnerID=8YFLogxK
U2 - 10.1109/ICIMW.2009.5325632
DO - 10.1109/ICIMW.2009.5325632
M3 - Conference contribution
AN - SCOPUS:72749095393
SN - 9781424454174
T3 - 34th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2009
BT - 34th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2009
T2 - 34th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2009
Y2 - 21 September 2009 through 25 September 2009
ER -