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Non-contact super-precision measurement of profile and radius of spheres

  • W. Q. Zhao*
  • , J. B. Tan
  • , J. Zhang
  • , W. G. Yang
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

A non-contact super-precision measuring method using Fizeau interference theory and multi-aperture connection technique was presented to get the entire sphere profile information. The correlation interference measurement information of sub-apertures in partial profile is obtained by the laser sphere interference system at different rotating positions. The multi-aperture connection and image processing are used to get the integrated profile and radius information of a sphere piece, and the optical routine is performed to eliminate Abbe error and Vacant band error caused by environment conditions during radius measurement.

Original languageEnglish
Pages (from-to)140-143
Number of pages4
JournalHarbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology
Volume33
Issue number2
Publication statusPublished - Apr 2001
Externally publishedYes

Keywords

  • 3-D surface profile measurement
  • Error compensation
  • Fringe-pattern connection technique
  • Multi-aperture combination
  • Radius measurement

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