Abstract
A non-contact super-precision measuring method using Fizeau interference theory and multi-aperture connection technique was presented to get the entire sphere profile information. The correlation interference measurement information of sub-apertures in partial profile is obtained by the laser sphere interference system at different rotating positions. The multi-aperture connection and image processing are used to get the integrated profile and radius information of a sphere piece, and the optical routine is performed to eliminate Abbe error and Vacant band error caused by environment conditions during radius measurement.
| Original language | English |
|---|---|
| Pages (from-to) | 140-143 |
| Number of pages | 4 |
| Journal | Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology |
| Volume | 33 |
| Issue number | 2 |
| Publication status | Published - Apr 2001 |
| Externally published | Yes |
Keywords
- 3-D surface profile measurement
- Error compensation
- Fringe-pattern connection technique
- Multi-aperture combination
- Radius measurement
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