@inproceedings{d1ad53bbc07d405a85dc2440007c8421,
title = "Nanoscale polymer blister formation using single femtosecond pulses",
abstract = "We fabricate micro-and nanoscale blister structures in polyimide films using tightly-focused femtosecond pulses. We model nonlinear absorption processes in both the film and the substrate. We find the volume of blisters grows linearly with the energy deposited in the polyimide film.",
keywords = "Femtosecond lasers, Laser fabrication, Microfabrication, Nanofabrication, Ultrafast optics",
author = "Godfrey, \{Alan T.K.\} and Kallepalli, \{L. N.Deepak\} and Chunmei Zhang and Corkum, \{P. B.\}",
note = "Publisher Copyright: {\textcopyright} 2020 IEEE.; 2020 IEEE Photonics Conference, IPC 2020 ; Conference date: 28-09-2020 Through 01-10-2020",
year = "2020",
month = sep,
doi = "10.1109/IPC47351.2020.9252402",
language = "English",
series = "2020 IEEE Photonics Conference, IPC 2020 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2020 IEEE Photonics Conference, IPC 2020 - Proceedings",
address = "United States",
}