@inproceedings{bdd62df9f9854381a6f8bfe556612041,
title = "Multi-Frequency Excitation for Performance Enhancement of Electric Field Mill Beyond the Critical Duffing Amplitude",
abstract = "We present a multi-frequency excitation (MFE) strategy for resonant micro-electric field mills. Unlike excitation methods reported in previous studies, this approach combines two AC signals with a DC bias to excite the sensor. The amplitude-frequency response, sensitivity, noise floor, and resolution are experimentally characterized for the third-order mode beyond its critical Duffing amplitude. Experimental results show that MFE improves the sensor performance metrics. The proposed approach provides a promising path to efficiently enhance the performance of a wide range of MEMS sensors.",
keywords = "MEMS, electric field mill, multi-frequency excitation, nonlinearity",
author = "Hongyun Ren and Lifang Ran and Najib Kacem and Jianhua Li and Xiaolong Wen and Seshia, \{Ashwin A.\}",
note = "Publisher Copyright: {\textcopyright} 2026 IEEE.; 21st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2026 ; Conference date: 17-04-2026 Through 21-04-2026",
year = "2026",
doi = "10.1109/NEMS69704.2026.11633605",
language = "English",
series = "2026 IEEE 21st International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2026",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "222--225",
booktitle = "2026 IEEE 21st International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2026",
address = "United States",
}