@inproceedings{f17716a4b5894d038cb972f7b4c6cc35,
title = "Multi-Degree-of-Freedom Electrothermal Microgripper Based on Al-Polyimide Bimorph Structures",
abstract = "Efficient and precise manipulation of micro-targets is essential for advancing micro-assembly applications. This paper presents an electrothermal microgripper integrated with a multi-degree-of-freedom platform, enabling over 600 μ m of vertical displacement and approximately 10° of out-of-plane deflection. These capabilities significantly enhance manipulation efficiency compared to traditional systems that rely on external platforms. The actuator features an Al-Photosensitive Polyimide (PSPI) bimorph structure, which improves both deformation capability and robustness. Experimental results demonstrate that the microgripper can efficiently manipulate a chip capacitor (with a size of 1 {\texttimes} 0.5 {\texttimes} 0.2 mm3, a mass of about 0.6 mg). These characteristics underscore its strong potential for micro-assembly, providing a novel solution for handling diverse micro-targets in complex assembly tasks.",
keywords = "Bimorph, Electrothermal Microgripper, MEMS, Manipulation, Photosensitive Polyimide",
author = "Hengzhang Yang and Qiangqiang Liu and Zonghao Li and Anrun Ren and Shuailong Zhang and Xiaoyi Wang and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2026 IEEE.; 39th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2026 ; Conference date: 25-01-2026 Through 29-01-2026",
year = "2026",
doi = "10.1109/MEMS64181.2026.11419577",
language = "English",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "911--914",
booktitle = "2026 IEEE 39th International Conference on Micro Electro Mechanical Systems, MEMS 2026",
address = "United States",
}