Multi-Degree of Freedom and Large Scan Range Electrothermal Micromirror Integrated with Thermal Convection-Based Mirror Plate Position Sensors

Anrun Ren; Yingtao Ding; Hengzhang Yang; Ziyue Zhang; Hui Zhao; Huikai Xie

doi:10.1109/MEMS61431.2025.10917554

Multi-Degree of Freedom and Large Scan Range Electrothermal Micromirror Integrated with Thermal Convection-Based Mirror Plate Position Sensors

Anrun Ren, Yingtao Ding^*, Hengzhang Yang, Ziyue Zhang, Hui Zhao, Huikai Xie^*

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In this work, we demonstrate a novel electrothermal micromirror integrated with thermal convection-based mirror-plate position sensors. The micromirror can generate multiple degree-of-freedom (DOF) motions including piston displacement and dual-axis angular scanning. The piston displacement can reach 400 μm, and the optical scan angles along x-axis and y-axis are up to 35° and 29°, respectively, at only 6 Vdc. Quasi-static measurements show that the sensitivities of the position sensors in piston displacement and angular scans along x-axis and y-axis are 0.7 mV/μm, 5.1 mV/°, and 4.7 mV/°, respectively.

Original language	English
Title of host publication	2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1059-1062
Number of pages	4
ISBN (Electronic)	9798331508890
DOIs	https://doi.org/10.1109/MEMS61431.2025.10917554
Publication status	Published - 2025
Externally published	Yes
Event	38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025 - Kaohsiung, Taiwan, Province of China Duration: 19 Jan 2025 → 23 Jan 2025

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025
Country/Territory	Taiwan, Province of China
City	Kaohsiung
Period	19/01/25 → 23/01/25

Keywords

electrothermal actuation
Electrothermal micromirror
position sensor
thermal convection

Access to Document

10.1109/MEMS61431.2025.10917554

Cite this

Ren, A., Ding, Y., Yang, H., Zhang, Z., Zhao, H., & Xie, H. (2025). Multi-Degree of Freedom and Large Scan Range Electrothermal Micromirror Integrated with Thermal Convection-Based Mirror Plate Position Sensors. In 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025 (pp. 1059-1062). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS61431.2025.10917554

Ren, Anrun ; Ding, Yingtao ; Yang, Hengzhang et al. / Multi-Degree of Freedom and Large Scan Range Electrothermal Micromirror Integrated with Thermal Convection-Based Mirror Plate Position Sensors. 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Institute of Electrical and Electronics Engineers Inc., 2025. pp. 1059-1062 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{5cb1327a5956468e8470ebd650de7c5c,

title = "Multi-Degree of Freedom and Large Scan Range Electrothermal Micromirror Integrated with Thermal Convection-Based Mirror Plate Position Sensors",

abstract = "In this work, we demonstrate a novel electrothermal micromirror integrated with thermal convection-based mirror-plate position sensors. The micromirror can generate multiple degree-of-freedom (DOF) motions including piston displacement and dual-axis angular scanning. The piston displacement can reach 400 μm, and the optical scan angles along x-axis and y-axis are up to 35° and 29°, respectively, at only 6 Vdc. Quasi-static measurements show that the sensitivities of the position sensors in piston displacement and angular scans along x-axis and y-axis are 0.7 mV/μm, 5.1 mV/°, and 4.7 mV/°, respectively.",

keywords = "electrothermal actuation, Electrothermal micromirror, position sensor, thermal convection",

author = "Anrun Ren and Yingtao Ding and Hengzhang Yang and Ziyue Zhang and Hui Zhao and Huikai Xie",

note = "Publisher Copyright: {\textcopyright} 2025 IEEE.; 38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025 ; Conference date: 19-01-2025 Through 23-01-2025",

year = "2025",

doi = "10.1109/MEMS61431.2025.10917554",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "1059--1062",

booktitle = "2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025",

address = "United States",

}

Ren, A, Ding, Y, Yang, H, Zhang, Z, Zhao, H & Xie, H 2025, Multi-Degree of Freedom and Large Scan Range Electrothermal Micromirror Integrated with Thermal Convection-Based Mirror Plate Position Sensors. in 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 1059-1062, 38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025, Kaohsiung, Taiwan, Province of China, 19/01/25. https://doi.org/10.1109/MEMS61431.2025.10917554

Multi-Degree of Freedom and Large Scan Range Electrothermal Micromirror Integrated with Thermal Convection-Based Mirror Plate Position Sensors. / Ren, Anrun; Ding, Yingtao; Yang, Hengzhang et al.
2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Institute of Electrical and Electronics Engineers Inc., 2025. p. 1059-1062 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Multi-Degree of Freedom and Large Scan Range Electrothermal Micromirror Integrated with Thermal Convection-Based Mirror Plate Position Sensors

AU - Ren, Anrun

AU - Ding, Yingtao

AU - Yang, Hengzhang

AU - Zhang, Ziyue

AU - Zhao, Hui

AU - Xie, Huikai

PY - 2025

Y1 - 2025

N2 - In this work, we demonstrate a novel electrothermal micromirror integrated with thermal convection-based mirror-plate position sensors. The micromirror can generate multiple degree-of-freedom (DOF) motions including piston displacement and dual-axis angular scanning. The piston displacement can reach 400 μm, and the optical scan angles along x-axis and y-axis are up to 35° and 29°, respectively, at only 6 Vdc. Quasi-static measurements show that the sensitivities of the position sensors in piston displacement and angular scans along x-axis and y-axis are 0.7 mV/μm, 5.1 mV/°, and 4.7 mV/°, respectively.

AB - In this work, we demonstrate a novel electrothermal micromirror integrated with thermal convection-based mirror-plate position sensors. The micromirror can generate multiple degree-of-freedom (DOF) motions including piston displacement and dual-axis angular scanning. The piston displacement can reach 400 μm, and the optical scan angles along x-axis and y-axis are up to 35° and 29°, respectively, at only 6 Vdc. Quasi-static measurements show that the sensitivities of the position sensors in piston displacement and angular scans along x-axis and y-axis are 0.7 mV/μm, 5.1 mV/°, and 4.7 mV/°, respectively.

KW - electrothermal actuation

KW - Electrothermal micromirror

KW - position sensor

KW - thermal convection

UR - http://www.scopus.com/inward/record.url?scp=105001666100&partnerID=8YFLogxK

U2 - 10.1109/MEMS61431.2025.10917554

DO - 10.1109/MEMS61431.2025.10917554

M3 - Conference contribution

AN - SCOPUS:105001666100

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 1059

EP - 1062

BT - 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 38th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2025

Y2 - 19 January 2025 through 23 January 2025

ER -

Ren A, Ding Y, Yang H, Zhang Z, Zhao H, Xie H. Multi-Degree of Freedom and Large Scan Range Electrothermal Micromirror Integrated with Thermal Convection-Based Mirror Plate Position Sensors. In 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems, MEMS 2025. Institute of Electrical and Electronics Engineers Inc. 2025. p. 1059-1062. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS61431.2025.10917554

Multi-Degree of Freedom and Large Scan Range Electrothermal Micromirror Integrated with Thermal Convection-Based Mirror Plate Position Sensors

Abstract

Publication series

Conference

Keywords

Access to Document

Other files and links

Fingerprint

Cite this