Miniaturized confocal Raman and Laser-induced breakdown spectroscopy imaging system based on micro-electro-mechanical mirror

Detection of the elemental and molecular structural distribution with high resolution and miniaturization of unknown minerals is a main bottleneck in deep space exploration and geology analysis. The aim is to enhance the accuracy of the chemical analysis of micro-samples by combining the distribution information from Raman spectroscopy and laser-induced breakdown spectroscopy (LIBS). The existing Raman-LIBS imaging methods are difficult to balance the imaging performance and system volume. There is an urgent need to develop a Raman-LIBS imaging method with miniaturization, and high imaging performance. A miniaturized Raman-LIBS imaging instrument based on the micro-electro-mechanical (MEMS) mirror has been developed to overcome these challenges. The instrument utilizes dual 2D MEMS mirror scanning technology to shorten the optical length of the system and improve the detection efficiency of hybrid spectral signals. The optical probe measures 94 mm × 66 mm, and has an axial focusing ability of approximately 40 nm, with a lateral resolution of approximately 700 nm for Raman maps and 9.5 μm for LIBS maps. As a proof experiment, 3D high-resolution Raman-LIBS hybrid spectral distribution maps of meteorite Tisserlitine 001 were obtained. The attainment of high imaging performance and miniaturization in hybrid spectral imaging is crucial for on-site chemical analysis. The proposed instrument enables in-situ spectrum and multispectral imaging with miniaturization, high spatial resolution, and high stability. The instrument is a powerful tool for composition and structural information characterization in the fields of space exploration and geological exploration.