Miniature endoscopic optical coherence tomography probe employing a two-axis microelectromechanical scanning mirror with through-silicon vias

Lin Liu; Lei Wu; Jingjing Sun; Elaine Lin; Huikai Xie

doi:10.1117/1.3533323

Miniature endoscopic optical coherence tomography probe employing a two-axis microelectromechanical scanning mirror with through-silicon vias

Lin Liu^*
, Lei Wu
, Jingjing Sun
, Elaine Lin
, Huikai Xie

^*Corresponding author for this work

University of Florida
WiOptix, Inc.

Research output: Contribution to journal › Article › peer-review

31 Citations (Scopus)

Abstract

We present the design and experimental results of a new MEMS-based endoscopic optical coherence tomography (OCT) probe. The uniqueness of this miniature OCT imaging probe is a two-axis MEMS mirror with through-silicon vias (TSVs) for interconnecting. The TSV interconnection enables ultracompact probe design, successfully reducing the probe size to only 2.6 mm in diameter. The MEMS mirror is actuated by an electrothermal actuator that is capable of scanning 16 at only 3.6 V DC. Two-dimensional and three-dimensional OCT images of microspheres embedded in PDMS and acute rat brain tissue have been obtained with this miniature probe in a time-domain OCT system.

Original language	English
Article number	026006
Journal	Journal of Biomedical Optics
Volume	16
Issue number	2
DOIs	https://doi.org/10.1117/1.3533323
Publication status	Published - Feb 2011
Externally published	Yes

Keywords

MEMS mirror
electrothermal actuation
endoscopic probe
optical coherence tomography
through-silicon via

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10.1117/1.3533323

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abstract = "We present the design and experimental results of a new MEMS-based endoscopic optical coherence tomography (OCT) probe. The uniqueness of this miniature OCT imaging probe is a two-axis MEMS mirror with through-silicon vias (TSVs) for interconnecting. The TSV interconnection enables ultracompact probe design, successfully reducing the probe size to only 2.6 mm in diameter. The MEMS mirror is actuated by an electrothermal actuator that is capable of scanning 16 at only 3.6 V DC. Two-dimensional and three-dimensional OCT images of microspheres embedded in PDMS and acute rat brain tissue have been obtained with this miniature probe in a time-domain OCT system.",

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AU - Xie, Huikai

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Miniature endoscopic optical coherence tomography probe employing a two-axis microelectromechanical scanning mirror with through-silicon vias

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Keywords

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