Mid-infrared tunable MEMS Fabry-Perot interferometer operated at the first interference order

Shaoyu Zhao*, Sen Zhang, Wenkai Li, Zhaochuan Wu, Fan Wang, Bin Long, Huikai Xie*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Results of tunable MEMS FPI operated in first interference order for the range of mid-infrared were presented. The HR coating is designed as two stacks of SiO / Ge QWOT Bragg reflectors. The AR was designed carefully to eliminate the stress mismatch induced by AR and HR coatings. The center wavelength tune from 4948 nm to 3612 nm actuated by 36.5 V control voltage. The FWHM of all spectra vary between 42 nm to 82 nm. The peak transmittances are large than 60% for all measured spectra.

Original languageEnglish
Title of host publicationAdvanced Fiber Laser Conference, AFL 2024
EditorsGuoqing Chang, Yan Feng
PublisherSPIE
ISBN (Electronic)9781510688872
DOIs
Publication statusPublished - 2025
Event2024 Advanced Fiber Laser Conference, AFL 2024 - Changsha, China
Duration: 8 Nov 202410 Nov 2024

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume13544
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

Conference2024 Advanced Fiber Laser Conference, AFL 2024
Country/TerritoryChina
CityChangsha
Period8/11/2410/11/24

Keywords

  • FPI
  • high reflectance coating
  • mid-infrared
  • phase shift on reflection

Fingerprint

Dive into the research topics of 'Mid-infrared tunable MEMS Fabry-Perot interferometer operated at the first interference order'. Together they form a unique fingerprint.

Cite this