Abstract
Metal/semiconductor Fex(In2O3)1-x granular films were prepared by the rf-sputtering. The microstructure was studied by using XRD, TEM and magnetic measurements. The results showed that the nanometer-sized Fe particles uniformly dispersed in the amorphous In2O3. Appropriate annealing leads to the crystallization of In2O3 films and the growth of the Fe particle size. As a result, the magnetic behavior of the films transits from superparamagnetic to ferromagnetic. The variation of the lattice constant for In2O3 depends on the volume fraction of Fe particles.
| Original language | English |
|---|---|
| Pages (from-to) | 1095-1098 |
| Number of pages | 4 |
| Journal | Jinshu Xuebao/Acta Metallurgica Sinica |
| Volume | 34 |
| Issue number | 10 |
| Publication status | Published - Oct 1998 |
| Externally published | Yes |
Keywords
- Metallic granular film
- Microstructure
- Semiconductor
- Super-paramagnetism