Micro/nano-structures-enhanced triboelectric nanogenerators by femtosecond laser direct writing

Triboelectric nanogenerator (TENG) is a new energy technology based on interface contact electrification, in which the surface micro/nano-structures of triboelectric layers have great impacts on output performances. Here, we propose micro/nano-structures-enhanced triboelectric nanogenerators by femtosecond laser direct writing on both triboelectric layers. With a laser scanning ablation technology, the micro/nano dual-scale structures in stripes and cones are fabricated on Cu film surfaces, respectively. While the micro-bowls structure in different sizes are fabricated on polydimethylsiloxane (PDMS) surfaces by single pulse irradiation. Based on these prepared triboelectric layers, several kinds of TENGs in contact-separation mode are systematically characterized, in which the TENG with micro/nano-cones structure on Cu surface and micro-bowls structure on PDMS surface has the optimal performances and achieves about 21 times enhancement in power density. This work provides an effective femtosecond laser direct writing process for fabricating micro/nano-structures on both triboelectric layers and enhancing the output performances of TENG, which would greatly promote the practicality of TENG in mass manufacturing and micro-energy utilization.