Micro-Scanning Error Correction Technique for an Optical Micro-Scanning Thermal Microscope Imaging System

An error correction technique for the micro-scanning instrument of the optical micro-scanning thermal microscope imaging system is proposed. The technique is based on micro-scanning technology combined with the proposed second-order oversampling reconstruction algorithm and local gradient image reconstruction algorithm. In this paper, we describe the local gradient image reconstruction model, the error correction technique, down-sampling model and the error correction principle. In this paper, we use a Lena original image and four low-resolution images obtained from the standard half-pixel displacement to simulate and verify the effectiveness of the proposed technique. In order to verify the effectiveness of the proposed technique, two groups of low-resolution thermal microscope images are collected by the actual thermal microscope imaging system for experimental study. Simulations and experiments show that the proposed technique can reduce the optical micro-scanning errors, improve the imaging effect of the system and improve the system's spatial resolution. It can be applied to other electro-optical imaging systems to improve their resolution.