Micro channel fabrication in PMMA substrates using CO2 laser and sacrificial mask process

Guangyi Shi; Qiang Huang; Wen J. Li; Wenqian Huang; Yanyun Ren; Jun Li; Kejie Li

Micro channel fabrication in PMMA substrates using CO₂ laser and sacrificial mask process

Guangyi Shi^*
, Qiang Huang
, Wen J. Li
, Wenqian Huang
, Yanyun Ren
, Jun Li
, Kejie Li

^*Corresponding author for this work

School of Mechatronical Engineering

Beijing Institute of Technology
Chinese University of Hong Kong

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Citations (Scopus)

Abstract

A novel system for 3D microchannel fabrication based on CO₂ laser-micromachining is presented. The system consists of a CO₂ laser focusing system and a 3D precision positioning platform. The CO ₂ laser focusing system can regulate a laser beam which is of high-energy and of micron dimension in beam diameter, and the movement precision of the 3D platform is of micron dimension. The fabrication of 3D microchannel system in PMMA (polymethyl methacrylate) can be realized by controlling the CO₂ laser and the platform. A special 'sacrificial mask' process was used to produce translucent channels of micron dimensions with low surface roughness using the developed system. The effectiveness of our developed system is confirmed by the experimental results. Potentially, our developed system can be automated to produce 3D micro channels in PMMA substrates without the requirement for the costly and time-consuming lithography and hot-embossing processes that are needed currently.

Original language	English
Title of host publication	Proceedings of the 2004 International Conference on Information Acquisition, ICIA 2004
Editors	T. Mei, M. Meng, Y. Ge, T.J. Tarn, Z. Wang, H. Szu
Pages	116-121
Number of pages	6
Publication status	Published - 2004
Event	2004 International Conference on Information Acquisition, ICIA 2004 - Hefei, China Duration: 21 Jun 2004 → 25 Jun 2004

Publication series

Name	Proceedings of the 2004 International Conference on Information Acquisition, ICIA 2004

Conference

Conference	2004 International Conference on Information Acquisition, ICIA 2004
Country/Territory	China
City	Hefei
Period	21/06/04 → 25/06/04

Cite this

Shi, G., Huang, Q., Li, W. J., Huang, W., Ren, Y., Li, J., & Li, K. (2004). Micro channel fabrication in PMMA substrates using CO₂ laser and sacrificial mask process. In T. Mei, M. Meng, Y. Ge, T. J. Tarn, Z. Wang, & H. Szu (Eds.), Proceedings of the 2004 International Conference on Information Acquisition, ICIA 2004 (pp. 116-121). (Proceedings of the 2004 International Conference on Information Acquisition, ICIA 2004).

Shi, Guangyi ; Huang, Qiang ; Li, Wen J. et al. / Micro channel fabrication in PMMA substrates using CO₂ laser and sacrificial mask process. Proceedings of the 2004 International Conference on Information Acquisition, ICIA 2004. editor / T. Mei ; M. Meng ; Y. Ge ; T.J. Tarn ; Z. Wang ; H. Szu. 2004. pp. 116-121 (Proceedings of the 2004 International Conference on Information Acquisition, ICIA 2004).

@inproceedings{caef6c06d771433282b8ac962d208a81,

title = "Micro channel fabrication in PMMA substrates using CO2 laser and sacrificial mask process",

abstract = "A novel system for 3D microchannel fabrication based on CO2 laser-micromachining is presented. The system consists of a CO2 laser focusing system and a 3D precision positioning platform. The CO 2 laser focusing system can regulate a laser beam which is of high-energy and of micron dimension in beam diameter, and the movement precision of the 3D platform is of micron dimension. The fabrication of 3D microchannel system in PMMA (polymethyl methacrylate) can be realized by controlling the CO2 laser and the platform. A special 'sacrificial mask' process was used to produce translucent channels of micron dimensions with low surface roughness using the developed system. The effectiveness of our developed system is confirmed by the experimental results. Potentially, our developed system can be automated to produce 3D micro channels in PMMA substrates without the requirement for the costly and time-consuming lithography and hot-embossing processes that are needed currently.",

author = "Guangyi Shi and Qiang Huang and Li, \{Wen J.\} and Wenqian Huang and Yanyun Ren and Jun Li and Kejie Li",

year = "2004",

language = "English",

isbn = "0780386299",

series = "Proceedings of the 2004 International Conference on Information Acquisition, ICIA 2004",

pages = "116--121",

editor = "T. Mei and M. Meng and Y. Ge and T.J. Tarn and Z. Wang and H. Szu",

booktitle = "Proceedings of the 2004 International Conference on Information Acquisition, ICIA 2004",

note = "2004 International Conference on Information Acquisition, ICIA 2004 ; Conference date: 21-06-2004 Through 25-06-2004",

}

Shi, G, Huang, Q, Li, WJ, Huang, W, Ren, Y, Li, J & Li, K 2004, Micro channel fabrication in PMMA substrates using CO₂ laser and sacrificial mask process. in T Mei, M Meng, Y Ge, TJ Tarn, Z Wang & H Szu (eds), Proceedings of the 2004 International Conference on Information Acquisition, ICIA 2004. Proceedings of the 2004 International Conference on Information Acquisition, ICIA 2004, pp. 116-121, 2004 International Conference on Information Acquisition, ICIA 2004, Hefei, China, 21/06/04.

Micro channel fabrication in PMMA substrates using CO₂ laser and sacrificial mask process. / Shi, Guangyi; Huang, Qiang; Li, Wen J. et al.
Proceedings of the 2004 International Conference on Information Acquisition, ICIA 2004. ed. / T. Mei; M. Meng; Y. Ge; T.J. Tarn; Z. Wang; H. Szu. 2004. p. 116-121 (Proceedings of the 2004 International Conference on Information Acquisition, ICIA 2004).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Micro channel fabrication in PMMA substrates using CO2 laser and sacrificial mask process

AU - Shi, Guangyi

AU - Huang, Qiang

AU - Li, Wen J.

AU - Huang, Wenqian

AU - Ren, Yanyun

AU - Li, Jun

AU - Li, Kejie

PY - 2004

Y1 - 2004

N2 - A novel system for 3D microchannel fabrication based on CO2 laser-micromachining is presented. The system consists of a CO2 laser focusing system and a 3D precision positioning platform. The CO 2 laser focusing system can regulate a laser beam which is of high-energy and of micron dimension in beam diameter, and the movement precision of the 3D platform is of micron dimension. The fabrication of 3D microchannel system in PMMA (polymethyl methacrylate) can be realized by controlling the CO2 laser and the platform. A special 'sacrificial mask' process was used to produce translucent channels of micron dimensions with low surface roughness using the developed system. The effectiveness of our developed system is confirmed by the experimental results. Potentially, our developed system can be automated to produce 3D micro channels in PMMA substrates without the requirement for the costly and time-consuming lithography and hot-embossing processes that are needed currently.

AB - A novel system for 3D microchannel fabrication based on CO2 laser-micromachining is presented. The system consists of a CO2 laser focusing system and a 3D precision positioning platform. The CO 2 laser focusing system can regulate a laser beam which is of high-energy and of micron dimension in beam diameter, and the movement precision of the 3D platform is of micron dimension. The fabrication of 3D microchannel system in PMMA (polymethyl methacrylate) can be realized by controlling the CO2 laser and the platform. A special 'sacrificial mask' process was used to produce translucent channels of micron dimensions with low surface roughness using the developed system. The effectiveness of our developed system is confirmed by the experimental results. Potentially, our developed system can be automated to produce 3D micro channels in PMMA substrates without the requirement for the costly and time-consuming lithography and hot-embossing processes that are needed currently.

UR - https://www.scopus.com/pages/publications/21444460011

M3 - Conference contribution

AN - SCOPUS:21444460011

SN - 0780386299

T3 - Proceedings of the 2004 International Conference on Information Acquisition, ICIA 2004

SP - 116

EP - 121

BT - Proceedings of the 2004 International Conference on Information Acquisition, ICIA 2004

A2 - Mei, T.

A2 - Meng, M.

A2 - Ge, Y.

A2 - Tarn, T.J.

A2 - Wang, Z.

A2 - Szu, H.

T2 - 2004 International Conference on Information Acquisition, ICIA 2004

Y2 - 21 June 2004 through 25 June 2004

ER -

Shi G, Huang Q, Li WJ, Huang W, Ren Y, Li J et al. Micro channel fabrication in PMMA substrates using CO₂ laser and sacrificial mask process. In Mei T, Meng M, Ge Y, Tarn TJ, Wang Z, Szu H, editors, Proceedings of the 2004 International Conference on Information Acquisition, ICIA 2004. 2004. p. 116-121. (Proceedings of the 2004 International Conference on Information Acquisition, ICIA 2004).

Micro channel fabrication in PMMA substrates using CO₂ laser and sacrificial mask process

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