Fingerprint
Dive into the research topics of 'MEMS mirrors based on curved concentric electrothermal actuators with very small lateral shift and tilt'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
MEMS mirrors based on curved concentric electrothermal actuators with very small lateral shift and tilt
Lin Liu, Sagnik Pal, Huikai Xie*
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
9
Citations
(Scopus)