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MEMS-based optical chemical sensors

  • Huikai Xie*
  • , Zhi Mei Qi
  • *Corresponding author for this work
  • University of Florida
  • CAS - Institute of Electronics

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

Original languageEnglish
Title of host publicationSemiconductor Device-Based Sensors for Gas, Chemical, and Biomedical Applications
PublisherCRC Press
Pages267-304
Number of pages38
ISBN (Electronic)9781439813881
ISBN (Print)9781138075399
Publication statusPublished - 19 Apr 2016
Externally publishedYes

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