Mechanical response of MEMS inductor with auxiliary pillar under high-g shock

Micro-electromechanical system (MEMS) suspended inductors have excellent radiofrequency (RF) performance, but poor mechanical properties. To improve their reliability, auxiliary pillars have been used. However, few studies have been carried out on the response of a suspended inductor with auxiliary pillars under high mechanical shock. In this paper, a theoretical method is proposed that combines a single-degree-of-freedom (SDOF) model and a method for solving statically indeterminate structures. The calculated results obtained by this proposed method were verified by finite-element analysis (ANSYS). The calculated results obtained by the proposed method were found to agree well with the results of ANSYS simulation. Finally, this method was extended to a suspended inductor with double auxiliary pillars. The method proposed in this paper provides a theoretical reference for mechanical performance evaluation and reliability optimization design for MEMS suspended inductors with auxiliary pillars.