Mechanical properties of TiC/metal multilayers synthesized by ion beam sputtering technique

Jing Wang; Wen Zhi Li; Heng De Li

doi:10.1116/1.1343098

Mechanical properties of TiC/metal multilayers synthesized by ion beam sputtering technique

Jing Wang
, Wen Zhi Li
, Heng De Li

Tsinghua University

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

The periodicity and structural properties of artificially modulated titanium carbide (TiC)/metal multilayers were studied by low angle x-ray diffraction technique. TiC/metal nanoscaled multilayers were prepared by multifunction ion beam assisted deposition system. Proper adjustment of the modulation parameters exhibited an increase in the hardness of multilayers. Multilayers hardness was found to be greater than the volume weighted mean of two components. Results exhibited that the dislocations were due to the reciprocal relationship between dislocation pile up mechanism and the dislocation image forces mechanism.

Original language	English
Pages (from-to)	250-254
Number of pages	5
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	19
Issue number	1
DOIs	https://doi.org/10.1116/1.1343098
Publication status	Published - Jan 2001
Externally published	Yes

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title = "Mechanical properties of TiC/metal multilayers synthesized by ion beam sputtering technique",

abstract = "The periodicity and structural properties of artificially modulated titanium carbide (TiC)/metal multilayers were studied by low angle x-ray diffraction technique. TiC/metal nanoscaled multilayers were prepared by multifunction ion beam assisted deposition system. Proper adjustment of the modulation parameters exhibited an increase in the hardness of multilayers. Multilayers hardness was found to be greater than the volume weighted mean of two components. Results exhibited that the dislocations were due to the reciprocal relationship between dislocation pile up mechanism and the dislocation image forces mechanism.",

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AU - Wang, Jing

AU - Li, Wen Zhi

AU - Li, Heng De

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N2 - The periodicity and structural properties of artificially modulated titanium carbide (TiC)/metal multilayers were studied by low angle x-ray diffraction technique. TiC/metal nanoscaled multilayers were prepared by multifunction ion beam assisted deposition system. Proper adjustment of the modulation parameters exhibited an increase in the hardness of multilayers. Multilayers hardness was found to be greater than the volume weighted mean of two components. Results exhibited that the dislocations were due to the reciprocal relationship between dislocation pile up mechanism and the dislocation image forces mechanism.

AB - The periodicity and structural properties of artificially modulated titanium carbide (TiC)/metal multilayers were studied by low angle x-ray diffraction technique. TiC/metal nanoscaled multilayers were prepared by multifunction ion beam assisted deposition system. Proper adjustment of the modulation parameters exhibited an increase in the hardness of multilayers. Multilayers hardness was found to be greater than the volume weighted mean of two components. Results exhibited that the dislocations were due to the reciprocal relationship between dislocation pile up mechanism and the dislocation image forces mechanism.

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JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 1

ER -

Mechanical properties of TiC/metal multilayers synthesized by ion beam sputtering technique

Abstract

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