Mechanical properties of nanoscaled TiC/Fe multilayers deposited by ion beam sputtering technique

Jing Wang; Wen Zhi Li; Heng De Li

doi:10.1016/S0040-6090(00)01686-2

Mechanical properties of nanoscaled TiC/Fe multilayers deposited by ion beam sputtering technique

Jing Wang
, Wen Zhi Li
, Heng De Li

Tsinghua University

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

TiC/Fe nanoscaled multilayers with layer thickness of l_TiC = l_Fe = λ/2 (where λ is the modulation wavelength of the multilayers) ranging from 0.9 to 12.5 nm have been deposited on Si(111) wafers by ion beam sputtering techniques at nearly ambient temperature. Low-angle and high-angle X-ray diffraction (XRD) examinations were used to analyze the structural properties of the films. Mechanical properties of these multilayers were also thoroughly studied. The hardness and elastic modulus of these multilayers were determined using a Nanoindenter. The nanohardness showed a strong dependence on the modulation wavelength. It was found that the multilayer hardness was greater than the volume-weighted-mean of the component hardness. With the modulation wavelength adjusted, the multilayer was even harder than its hard component (TiC). A maximum hardness of 27.47 GPa, approximately one time larger than that of the rule-of-mixture values, was found at λ = 10.2 nm. A possible mechanism for hardening is discussed.

Original language	English
Pages (from-to)	190-193
Number of pages	4
Journal	Thin Solid Films
Volume	382
Issue number	1-2
DOIs	https://doi.org/10.1016/S0040-6090(00)01686-2
Publication status	Published - 1 Feb 2001
Externally published	Yes

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10.1016/S0040-6090(00)01686-2

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@article{271f814325e34ada90e597561eeed9c3,

title = "Mechanical properties of nanoscaled TiC/Fe multilayers deposited by ion beam sputtering technique",

abstract = "TiC/Fe nanoscaled multilayers with layer thickness of lTiC = lFe = λ/2 (where λ is the modulation wavelength of the multilayers) ranging from 0.9 to 12.5 nm have been deposited on Si(111) wafers by ion beam sputtering techniques at nearly ambient temperature. Low-angle and high-angle X-ray diffraction (XRD) examinations were used to analyze the structural properties of the films. Mechanical properties of these multilayers were also thoroughly studied. The hardness and elastic modulus of these multilayers were determined using a Nanoindenter. The nanohardness showed a strong dependence on the modulation wavelength. It was found that the multilayer hardness was greater than the volume-weighted-mean of the component hardness. With the modulation wavelength adjusted, the multilayer was even harder than its hard component (TiC). A maximum hardness of 27.47 GPa, approximately one time larger than that of the rule-of-mixture values, was found at λ = 10.2 nm. A possible mechanism for hardening is discussed.",

author = "Jing Wang and Li, \{Wen Zhi\} and Li, \{Heng De\}",

year = "2001",

month = feb,

day = "1",

doi = "10.1016/S0040-6090(00)01686-2",

language = "English",

volume = "382",

pages = "190--193",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

number = "1-2",

}

TY - JOUR

T1 - Mechanical properties of nanoscaled TiC/Fe multilayers deposited by ion beam sputtering technique

AU - Wang, Jing

AU - Li, Wen Zhi

AU - Li, Heng De

PY - 2001/2/1

Y1 - 2001/2/1

N2 - TiC/Fe nanoscaled multilayers with layer thickness of lTiC = lFe = λ/2 (where λ is the modulation wavelength of the multilayers) ranging from 0.9 to 12.5 nm have been deposited on Si(111) wafers by ion beam sputtering techniques at nearly ambient temperature. Low-angle and high-angle X-ray diffraction (XRD) examinations were used to analyze the structural properties of the films. Mechanical properties of these multilayers were also thoroughly studied. The hardness and elastic modulus of these multilayers were determined using a Nanoindenter. The nanohardness showed a strong dependence on the modulation wavelength. It was found that the multilayer hardness was greater than the volume-weighted-mean of the component hardness. With the modulation wavelength adjusted, the multilayer was even harder than its hard component (TiC). A maximum hardness of 27.47 GPa, approximately one time larger than that of the rule-of-mixture values, was found at λ = 10.2 nm. A possible mechanism for hardening is discussed.

AB - TiC/Fe nanoscaled multilayers with layer thickness of lTiC = lFe = λ/2 (where λ is the modulation wavelength of the multilayers) ranging from 0.9 to 12.5 nm have been deposited on Si(111) wafers by ion beam sputtering techniques at nearly ambient temperature. Low-angle and high-angle X-ray diffraction (XRD) examinations were used to analyze the structural properties of the films. Mechanical properties of these multilayers were also thoroughly studied. The hardness and elastic modulus of these multilayers were determined using a Nanoindenter. The nanohardness showed a strong dependence on the modulation wavelength. It was found that the multilayer hardness was greater than the volume-weighted-mean of the component hardness. With the modulation wavelength adjusted, the multilayer was even harder than its hard component (TiC). A maximum hardness of 27.47 GPa, approximately one time larger than that of the rule-of-mixture values, was found at λ = 10.2 nm. A possible mechanism for hardening is discussed.

UR - https://www.scopus.com/pages/publications/0034831158

U2 - 10.1016/S0040-6090(00)01686-2

DO - 10.1016/S0040-6090(00)01686-2

M3 - Article

AN - SCOPUS:0034831158

SN - 0040-6090

VL - 382

SP - 190

EP - 193

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1-2

ER -

Mechanical properties of nanoscaled TiC/Fe multilayers deposited by ion beam sputtering technique

Abstract

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