Abstract
This research is aimed at the development of computer-aided polishing technology for optical surfaces using magnetorheological (MR) fluid as medium. The mechanism of a dual-axis polishing wheel and the mathematical model combined with a symmetrical tool function are demonstrated. The effects of speed, gap, time and geometric parameters of the tool have been experimentally evaluated by polishing a parabolic BK7 mirror in 120 mm diameter. The surface topography presented an obvious amelioration, and the shape accuracy decreased to 0. 067λ from 0. 519λ (λ = 632. 8 nm, RMS) after 75 min finishing.
| Original language | English |
|---|---|
| Pages (from-to) | 408-412 |
| Number of pages | 5 |
| Journal | Frontiers of Optoelectronics in China |
| Volume | 3 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - 2010 |
| Externally published | Yes |
Keywords
- magnetorheological finishing (MRF)
- material removal
- symmetrical tool function