Magnetorheological finishing for aspheric surface with nanometer accuracy

Magnetorheological finishing (MRF) for manufacturing high accuracy optical aspheric components is a promising technique in the field of super-precision fabricating technology. A novel aspheric manufacturing system equipped with MRF function is introduced, which incorporates a host of features and has unprecedented fabricating versatilities. It is a five coordinates, self-rotating wheel polishing machine, the pre-polishing and fine polishing processes can be done utilized the system only need to adjust different coefficients. The main parameters such as relative pressure, velocity between the polishing wheel and the workpiece are analyzed experimentally. The practicability of the home made MRF system is verified for polishing a mirror made from K9 glass. The surface roughness of the experimenting workpiece has decreased to 0.6739 nm Ra after polishing for 23 min.