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Light field microscope for 3D profile measurement of micro-structured array

  • Yao Hu
  • , Haibo Gao
  • , Shizhu Yuan
  • , Rui Shi
  • Beijing Institute of Technology

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Micro-structured array is a crucial optical element with wide range of applications. The optical performance of micro-structured array is determined by feature sizes of array, such as diameter, depth and the uniformity across the whole array. Those sizes can be directed retrieved from the 3D profile. We propose a 3D profile measurement system based on light field microscope, which is promising in achieving fast data acquisition by one shot. We propose the principle of measurement, develop the algorithm for focus stack calculation and 3D reconstruction. Preliminary experiments suggest the prospects and challenges.

Original languageEnglish
Title of host publicationMOC 2015 - Technical Digest of 20th Microoptics Conference
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9784863485433
DOIs
Publication statusPublished - 23 Feb 2016
Event20th Microoptics Conference, MOC 2015 - Fukuoka, Japan
Duration: 25 Oct 201528 Oct 2015

Publication series

NameMOC 2015 - Technical Digest of 20th Microoptics Conference

Conference

Conference20th Microoptics Conference, MOC 2015
Country/TerritoryJapan
CityFukuoka
Period25/10/1528/10/15

Keywords

  • Charge coupled devices
  • Lenses
  • Microoptics
  • Microscopy
  • Optical arrays
  • Optical variables measurement
  • Three-dimensional displays

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