TY - GEN
T1 - Large-range large-aperture MEMS micromirrors for biomedical imaging
AU - Xie, Huikai
PY - 2008
Y1 - 2008
N2 - Micromirrors with large scan ranges, large aperture sizes, fast speeds, low voltages and low cost are needed for optical switching, displays and biomedical imaging, but it is very challenging to simultaneously meet all the requirements. This paper introduces electrothermal bimorph based micromirrors that can overcome the challenge. For example, a large-vertical-displacement (LVD) micromirror scans 0.7mm vertically at less than 25Vdc. A lateral-shift-free (LSF) LVD generates a piston motion of 0.6mm and scans more than 30° about two axes at less than 8Vdc. An inverted-series-connected (ISC) micromirror scans ±30° about two axes with no rotation axis shifts. All these mirrors have an optical aperture of 1 mm. Their resonant frequencies range from 300Hz to 2kHz. Some of these micromirrors have been applied in biomedical imaging applications.
AB - Micromirrors with large scan ranges, large aperture sizes, fast speeds, low voltages and low cost are needed for optical switching, displays and biomedical imaging, but it is very challenging to simultaneously meet all the requirements. This paper introduces electrothermal bimorph based micromirrors that can overcome the challenge. For example, a large-vertical-displacement (LVD) micromirror scans 0.7mm vertically at less than 25Vdc. A lateral-shift-free (LSF) LVD generates a piston motion of 0.6mm and scans more than 30° about two axes at less than 8Vdc. An inverted-series-connected (ISC) micromirror scans ±30° about two axes with no rotation axis shifts. All these mirrors have an optical aperture of 1 mm. Their resonant frequencies range from 300Hz to 2kHz. Some of these micromirrors have been applied in biomedical imaging applications.
UR - http://www.scopus.com/inward/record.url?scp=60649095394&partnerID=8YFLogxK
U2 - 10.1109/ICSICT.2008.4735106
DO - 10.1109/ICSICT.2008.4735106
M3 - Conference contribution
AN - SCOPUS:60649095394
SN - 9781424421855
T3 - International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT
SP - 2549
EP - 2552
BT - ICSICT 2008 - 2008 9th International Conference on Solid-State and Integrated-Circuit Technology Proceedings
T2 - 2008 9th International Conference on Solid-State and Integrated-Circuit Technology, ICSICT 2008
Y2 - 20 October 2008 through 23 October 2008
ER -