Investigation of fabricating a LiNbO 3 ultrasonic phased array transducer of more than 100 MHz

J. Y. Zhang; W. J. Xu; J. Carlier; X. M. Ji; B. Nongaillard; S. Queste; Y. P. Huang

doi:10.1109/ICSENS.2011.6126901

Investigation of fabricating a LiNbO ₃ ultrasonic phased array transducer of more than 100 MHz

J. Y. Zhang
, W. J. Xu^*
, J. Carlier
, X. M. Ji
, B. Nongaillard
, S. Queste
, Y. P. Huang

^*Corresponding author for this work

Université Polytechnique Hauts-de-France
Fudan University
FEMTO-ST

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

36°/Y-cut lithium niobate (LiNbO ₃) single crystals have been patterned by means of Inductively Coupled Plasma (ICP) deep etching to create ultrasonic arrays resonating in the frequency range of 100-200 MHz. The limitation of etching aspect ratio and the minimum pitch are explored under the optimized ICP parameters. The experimental results demonstrate that the minimum pitch could be obtained at about 25 μm, equivalent to a pitch of 1.6 λ, with a kerf depth of 16 μm. Focusing Ion Beam (FIB) technique is also studied to etch LiNbO ₃ crystals. The aspect ratio is up to as high as 6. A pitch of 0.5 λ can be obtained for a 100 MHz half-kerfed LiNbO ₃ array.

Original language	English
Title of host publication	IEEE Sensors 2011 Conference, SENSORS 2011
Pages	1542-1545
Number of pages	4
DOIs	https://doi.org/10.1109/ICSENS.2011.6126901
Publication status	Published - 2011
Externally published	Yes
Event	10th IEEE SENSORS Conference 2011, SENSORS 2011 - Limerick, Ireland Duration: 28 Oct 2011 → 31 Oct 2011

Publication series

Name	Proceedings of IEEE Sensors

Conference

Conference	10th IEEE SENSORS Conference 2011, SENSORS 2011
Country/Territory	Ireland
City	Limerick
Period	28/10/11 → 31/10/11

Access to Document

10.1109/ICSENS.2011.6126901

Cite this

@inproceedings{2efc1a2b340b40ee8ec4002c125d5b93,

title = "Investigation of fabricating a LiNbO 3 ultrasonic phased array transducer of more than 100 MHz",

abstract = "36°/Y-cut lithium niobate (LiNbO 3) single crystals have been patterned by means of Inductively Coupled Plasma (ICP) deep etching to create ultrasonic arrays resonating in the frequency range of 100-200 MHz. The limitation of etching aspect ratio and the minimum pitch are explored under the optimized ICP parameters. The experimental results demonstrate that the minimum pitch could be obtained at about 25 μm, equivalent to a pitch of 1.6 λ, with a kerf depth of 16 μm. Focusing Ion Beam (FIB) technique is also studied to etch LiNbO 3 crystals. The aspect ratio is up to as high as 6. A pitch of 0.5 λ can be obtained for a 100 MHz half-kerfed LiNbO 3 array.",

author = "Zhang, \{J. Y.\} and Xu, \{W. J.\} and J. Carlier and Ji, \{X. M.\} and B. Nongaillard and S. Queste and Huang, \{Y. P.\}",

year = "2011",

doi = "10.1109/ICSENS.2011.6126901",

language = "English",

isbn = "9781424492886",

series = "Proceedings of IEEE Sensors",

pages = "1542--1545",

booktitle = "IEEE Sensors 2011 Conference, SENSORS 2011",

note = "10th IEEE SENSORS Conference 2011, SENSORS 2011 ; Conference date: 28-10-2011 Through 31-10-2011",

}

Zhang, JY, Xu, WJ, Carlier, J, Ji, XM, Nongaillard, B, Queste, S & Huang, YP 2011, Investigation of fabricating a LiNbO ₃ ultrasonic phased array transducer of more than 100 MHz. in IEEE Sensors 2011 Conference, SENSORS 2011., 6126901, Proceedings of IEEE Sensors, pp. 1542-1545, 10th IEEE SENSORS Conference 2011, SENSORS 2011, Limerick, Ireland, 28/10/11. https://doi.org/10.1109/ICSENS.2011.6126901

TY - GEN

T1 - Investigation of fabricating a LiNbO 3 ultrasonic phased array transducer of more than 100 MHz

AU - Zhang, J. Y.

AU - Xu, W. J.

AU - Carlier, J.

AU - Ji, X. M.

AU - Nongaillard, B.

AU - Queste, S.

AU - Huang, Y. P.

PY - 2011

Y1 - 2011

N2 - 36°/Y-cut lithium niobate (LiNbO 3) single crystals have been patterned by means of Inductively Coupled Plasma (ICP) deep etching to create ultrasonic arrays resonating in the frequency range of 100-200 MHz. The limitation of etching aspect ratio and the minimum pitch are explored under the optimized ICP parameters. The experimental results demonstrate that the minimum pitch could be obtained at about 25 μm, equivalent to a pitch of 1.6 λ, with a kerf depth of 16 μm. Focusing Ion Beam (FIB) technique is also studied to etch LiNbO 3 crystals. The aspect ratio is up to as high as 6. A pitch of 0.5 λ can be obtained for a 100 MHz half-kerfed LiNbO 3 array.

AB - 36°/Y-cut lithium niobate (LiNbO 3) single crystals have been patterned by means of Inductively Coupled Plasma (ICP) deep etching to create ultrasonic arrays resonating in the frequency range of 100-200 MHz. The limitation of etching aspect ratio and the minimum pitch are explored under the optimized ICP parameters. The experimental results demonstrate that the minimum pitch could be obtained at about 25 μm, equivalent to a pitch of 1.6 λ, with a kerf depth of 16 μm. Focusing Ion Beam (FIB) technique is also studied to etch LiNbO 3 crystals. The aspect ratio is up to as high as 6. A pitch of 0.5 λ can be obtained for a 100 MHz half-kerfed LiNbO 3 array.

UR - https://www.scopus.com/pages/publications/84863070005

U2 - 10.1109/ICSENS.2011.6126901

DO - 10.1109/ICSENS.2011.6126901

M3 - Conference contribution

AN - SCOPUS:84863070005

SN - 9781424492886

T3 - Proceedings of IEEE Sensors

SP - 1542

EP - 1545

BT - IEEE Sensors 2011 Conference, SENSORS 2011

T2 - 10th IEEE SENSORS Conference 2011, SENSORS 2011

Y2 - 28 October 2011 through 31 October 2011

ER -