@inproceedings{c8ed974101f14b68b3141be1e8ba2c41,
title = "Internal structuring of silicon with multi-timescale irradiations",
abstract = "By combining and synchronizing pulses of different durations from 170 fs to 5 ns, we benchmark the appropriate temporal characteristics of laser pulses for 3D writing applications inside silicon.",
author = "Amlan Das and Andong Wang and Olivier Uteza and David Grojo",
note = "Publisher Copyright: {\textcopyright} 2021 OSA.; 2021 Conference on Lasers and Electro-Optics, CLEO 2021 ; Conference date: 09-05-2021 Through 14-05-2021",
year = "2021",
month = may,
language = "English",
series = "2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2021 Conference on Lasers and Electro-Optics, CLEO 2021 - Proceedings",
address = "United States",
}