Interferometry-based integrated measurement method of surface figure error and surface defects of optical components

Aiming at the lack of fast and accurate integrated measurement of surface figure error surface figure error and surface defects of optical components, this paper proposes an interferometry-based method for the integrated measurement of surface figure error and surface defects of optical components. The method first uses the traditional interferometric method to measure the surface figure error of optical components. On this basis, a new surface figure error characterization method is introduced to process the surface figure error measurement data to enhance the appearance of surface defects. Subsequently, the processed surface figure error data is output as an image, and the surface defects are identified using connected component analysis methods in the field of image processing, which in turn enables the localization and area measurement of the surface defects. The method accomplishes the measurement of surface figure error and surface defects of optical components through the same measurement system, which can realize the accurate mapping between the surface figure error and the surface defects of the measured components through the pixel coordinates, thus realizing the integrated measurement of surface figure error and surface defects of optical components. The experimental results show that the method can accomplish the integrated measurement of surface figure error and surface defects of optical components.