Interface-controlled uniaxial in-plane ferroelectricity in Hf0.5Zr0.5O2(100) epitaxial thin films

Kai Liu, Feng Jin, Tianyuan Zhu, Jie Fang, Xingchang Zhang, Erhao Peng, Kuan Liu, Qiming Lv, Kunjie Dai, Yajun Tao, Jingdi Lu, Haoliang Huang, Jiachen Li, Shouzhe Dong, Shengchun Shen, Yuewei Yin, Houbing Huang, Zhenlin Luo*, Chao Ma*, Shi Liu*Lingfei Wang*, Wenbin Wu*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

Hafnium oxide-based ferroelectric thin films are widely recognized as a CMOS-compatible and highly scalable material platform for next-generation non-volatile memory and logic devices. While out-of-plane ferroelectricity in hafnium oxide films has been intensively investigated and utilized in devices, purely in-plane ferroelectricity of hafnium oxides remains unexplored. In this work, we demonstrate a reversible structural modulation of the orthorhombic phase Hf0.5Zr0.5O2 films between (111)-oriented [HZO(111)O] multi-domain and (100)-oriented [HZO(100)O] single-domain configurations by altering perovskite oxide buffer layers. Unlike conventional out-of-plane polarized HZO(111)O films, the HZO(100)O films exhibit uniaxial in-plane ferroelectric polarization, sustained even at a thickness of 1.0 nm. Furthermore, the in-plane ferroelectric switching achieves an ultralow coercivity of ~0.5 MV/cm. The HZO(100)O phase is stabilized by a staggered interfacial reconstruction, driven by the delicate interplays between symmetry mismatch and surface energy. These findings pave the way for innovative device designs and strategies for modulating the functionalities of hafnium oxide-based ferroelectrics.

Original languageEnglish
Article number7385
JournalNature Communications
Volume16
Issue number1
DOIs
Publication statusPublished - Dec 2025
Externally publishedYes

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