@inproceedings{1dfce349139d424f96a3201a22129afd,
title = "Integrated Thermal Convection-Based Position Sensing for Electrothermal Micromirrors",
abstract = "This paper serves to demonstrate thermal convection-based sensing as a promising vertical piston displacement and tilt angle sensing mechanism for electrothermal micromirrors. This position sensor consists of one heater located at each of the other two sides of the mirror plate and four thermistors located on the substrate adjacent to each of the heaters on the mirror plate. The position sensor can detect the vertical displacement with a sensitivity of 0.2 mV/μm in the range of 350μm and the tilt angle with a sensitivity of 2.63 mV/° in the range of 20°.",
keywords = "Electrothermal micromirror, position sensing, thermal convection",
author = "Anrun Ren and Yingtao Ding and Hengzhang Yang and Teng Pan and Huikai Xie",
note = "Publisher Copyright: {\textcopyright} 2023 IEEJ.; 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 ; Conference date: 25-06-2023 Through 29-06-2023",
year = "2023",
language = "English",
series = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "334--337",
booktitle = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
address = "United States",
}