Infrared dynamic scenes generating technique based on MEMS

A technique of dynamic IR scene generation based on MEMS was presented. The theoretical model of IR scenes display film based on visible/infrared image film transducer was established. The MEMS technological processes of fabricating the film were introduced. The film with 512×512 pixels was produced, and the pixel size of the film was 35 µm. Based on the IR scene generation film an IR dynamic scene generator was built. The performances of the IR dynamic scene generator were studied experimentally. The IR scenes display film based on visible/infrared image film transducer can be used in two wave bands from 3 µm to 5 µm and 8 µm to 12 µm. The spatial resolution of the IR dynamic scene generator is 14 lp/mm. In the wave band from 3 µm to 5 µm, the equivalent blackbody temperature can be from 250 K to 440 K, and in the wave band from 8 µm to 12 µm, the equivalent blackbody temperature can be from 250 K to 400 K.