@inproceedings{fcde8ed1e7d54e1c86d94cb5540a47ce,
title = "In situ nanomanipulation with 3D SEM-CT observation inside environmental SEM",
abstract = "In situ nanomanipulation system is presented with 3D scanning electron microscope - computed tomography (SEM-CT) system integrated with inside an environmental - SEM (E-SEM). The E-SEM was used to achieve a real-time high resolution imaging for high precision nanomanipulation. The SEM-CT system was used for obtaining 3D cross-sectional image with sub-micron high resolution. In this paper, Caenorhabditis elegans (C. elegans) was used as a target of biological sample to demonstrate a nanoinjection operation. The nanoinjection was determined by the SEM-CT system with its 3D information.",
author = "Masahiro Nakajima and Masaru Takeuchi and Toshio Fukuda and Yasuhisa Hasegawa and Qiang Huang",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; International Symposium on Micro-NanoMechatronics and Human Science, MHS 2015 ; Conference date: 23-11-2015 Through 25-11-2015",
year = "2016",
month = mar,
day = "21",
doi = "10.1109/MHS.2015.7438314",
language = "English",
series = "2015 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2015 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2015",
address = "United States",
}