In situ nanomanipulation with 3D SEM-CT observation inside environmental SEM

  • Masahiro Nakajima
  • , Masaru Takeuchi
  • , Toshio Fukuda
  • , Yasuhisa Hasegawa
  • , Qiang Huang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Citations (Scopus)

Abstract

In situ nanomanipulation system is presented with 3D scanning electron microscope - computed tomography (SEM-CT) system integrated with inside an environmental - SEM (E-SEM). The E-SEM was used to achieve a real-time high resolution imaging for high precision nanomanipulation. The SEM-CT system was used for obtaining 3D cross-sectional image with sub-micron high resolution. In this paper, Caenorhabditis elegans (C. elegans) was used as a target of biological sample to demonstrate a nanoinjection operation. The nanoinjection was determined by the SEM-CT system with its 3D information.

Original languageEnglish
Title of host publication2015 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479966783
DOIs
Publication statusPublished - 21 Mar 2016
EventInternational Symposium on Micro-NanoMechatronics and Human Science, MHS 2015 - Nagoya, Japan
Duration: 23 Nov 201525 Nov 2015

Publication series

Name2015 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2015

Conference

ConferenceInternational Symposium on Micro-NanoMechatronics and Human Science, MHS 2015
Country/TerritoryJapan
CityNagoya
Period23/11/1525/11/15

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