High-resolution two-dimensional solid-state beam scanner module based on vertical-cavity-surface-emitting laser array

We realized electrical 2D beam scanning with a field of view of 64° × 14° and resolution points number of >9000 (450 × 20) by fabricating a linear array of beam scanners integrated with an electro-thermally tunable surface-grating vertical-cavity surface-emitting laser and assisting with a cylindrical lens. It is expected to cover the field of view of 108° × 40° with resolution points number of >49 000 (780 × 64) by enlarging the full diffraction angle of the diffractive optical element and integrating more scanners in the array. The total module size could be managed in 1 cm scale thanks to the omission of external light sources and simply stacked optics.