TY - JOUR
T1 - High-Resolution Carbon-Based Tactile Sensor Array for Dynamic Pulse Imaging
AU - Tian, Xin
AU - Cheng, Guanyin
AU - Wu, Zhonghuai
AU - Wen, Xudong
AU - Kong, Yongkang
AU - Long, Pan
AU - Zhao, Fubang
AU - Li, Zhongxiang
AU - Zhang, Dong
AU - Hu, Yonghe
AU - Wei, Dapeng
N1 - Publisher Copyright:
© 2024 Wiley-VCH GmbH.
PY - 2024/11/12
Y1 - 2024/11/12
N2 - With the development of modern medicine, the importance of continuous and reliable pulse wave monitoring has increased significantly in physiological evaluation and disease diagnosis. Among them, the 3D reconstruction of the pulse wave is indispensable, and needs rely on ultra-high resolution sensor arrays, that is, high spatial resolution, temporal resolution, and force resolution. Herein, a flexible high-density 32 × 32 tactile sensor array based on pressure-sensitive tunneling mechanism is develpoed. Conformal graphene nanowalls (GNWs) pattern arrays are deposited on micro-pyramidal structural Si substrate via mask-assisted plasma enhanced chemical vapor deposition (PECVD) method and are adopted as pressure-sensitive electrode, exhibiting a spatial resolution of 64 dots/cm2, high sensitivity (222.36 kPa−1) and short response time (2 ms). More importantly, HfO2 tunneling layer can effectively suppress noise current, which made it sense weak pressure signals with 1/1000 force resolution and SNR of 36.32 dB. By leveraging its high-resolution array, more holistic pulse signals are acquired and the 3D shape of the pulse wave are successfully replicated. This work shows high-resolution sensors have significant promise for applications in remote intelligent diagnostics.
AB - With the development of modern medicine, the importance of continuous and reliable pulse wave monitoring has increased significantly in physiological evaluation and disease diagnosis. Among them, the 3D reconstruction of the pulse wave is indispensable, and needs rely on ultra-high resolution sensor arrays, that is, high spatial resolution, temporal resolution, and force resolution. Herein, a flexible high-density 32 × 32 tactile sensor array based on pressure-sensitive tunneling mechanism is develpoed. Conformal graphene nanowalls (GNWs) pattern arrays are deposited on micro-pyramidal structural Si substrate via mask-assisted plasma enhanced chemical vapor deposition (PECVD) method and are adopted as pressure-sensitive electrode, exhibiting a spatial resolution of 64 dots/cm2, high sensitivity (222.36 kPa−1) and short response time (2 ms). More importantly, HfO2 tunneling layer can effectively suppress noise current, which made it sense weak pressure signals with 1/1000 force resolution and SNR of 36.32 dB. By leveraging its high-resolution array, more holistic pulse signals are acquired and the 3D shape of the pulse wave are successfully replicated. This work shows high-resolution sensors have significant promise for applications in remote intelligent diagnostics.
KW - 3D reconstruction
KW - high-resolution
KW - pressure sensor array
KW - pulse wave monitoring
UR - http://www.scopus.com/inward/record.url?scp=85195454650&partnerID=8YFLogxK
U2 - 10.1002/adfm.202406022
DO - 10.1002/adfm.202406022
M3 - Article
AN - SCOPUS:85195454650
SN - 1616-301X
VL - 34
JO - Advanced Functional Materials
JF - Advanced Functional Materials
IS - 46
M1 - 2406022
ER -