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High-precision and high-efficiency fabrication of blazed grating by ultrasonic-assisted ultraprecision planing
Ziqi Chen, Qian Yu, Keita Shimada, Peng Liu, Yupeng He, Yao Hu, Xibin Wang, Tianfeng Zhou*, Masayoshi Mizutani
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
11
Citations
(Scopus)