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High-precision 2D grating displacement measurement system based on double-spatial heterodyne optical path interleaving
Yunfei Yin, Zhaowu Liu, Shan Jiang, Wei Wang, Hongzhu Yu, Galantu Jiri, Qun Hao, Wenhao Li*
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
19
Citations
(Scopus)