@inproceedings{85929d67ffa54aad81303cb674450a2b,
title = "High Performance Flexible Calorimetric Flow Sensor Based on Kirigami-Structured Substrate for Complex Surface Bonding Scenarios",
abstract = "This article presents a calorimetric flow sensor based on Kirigami substrate using an integrated fabrication method. For the first time, the application of Kirigami-structured substrate is applied in the field of flow sensing, enabling superior adaptability to complex surface bonding scenarios such as respiratory detection. A set of efficient flexible suspended thin-film processing technology was also developed, which improved the performance of the equipment and reduced manufacturing costs. It has achieved high sensitivity of 745mV/(m/s) and low power consumption of 2.93 mW.",
keywords = "Calorimetric Flow Sensor, Flexible, Kirigami, suspended thin-film",
author = "Kai Qiao and Daishan Yue and Hanlun Guan and Jianyu Wang and Zong Liu and Huikai Xie and Xiaoyi Wang",
note = "Publisher Copyright: {\textcopyright} 2026 IEEE.; 21st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2026 ; Conference date: 17-04-2026 Through 21-04-2026",
year = "2026",
doi = "10.1109/NEMS69704.2026.11633848",
language = "English",
series = "2026 IEEE 21st International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2026",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "287--290",
booktitle = "2026 IEEE 21st International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2026",
address = "United States",
}