Gaussian filtering process on the confocal component measurement system data processing

In order to improve the position precision of the confocal component parameters measurement system, a process data based on Gaussian filtering process is proposed on the disk images collected by the confocal system and confocal axial intensity response signale. The method reduces the optical noise on the disk images, and it weakens the interference of the factors such as environmental perturbations on the confocal axial intensity response signale. The theoretical analyses and preliminary experiments indicate that Gaussian filtering on the disk images and confocal axial intensity response signal can effectively suppress the image noise and reduce the high harmonic interference, thus it improves the system position accuracy.