TY - JOUR
T1 - Free-form surface measurement with laser differential confocal precise positioning
AU - Zhang, Xiaocheng
AU - Qiu, Lirong
AU - Zhao, Weiqian
AU - Fu, Yuan
AU - Wang, Yun
AU - Liu, Yuhan
N1 - Publisher Copyright:
© 2024 Elsevier Ltd
PY - 2025/5
Y1 - 2025/5
N2 - For free-form surfaces with multiple degrees of freedom, conventional interferometric detection methods face challenges in achieving dynamic detection during the machining process, primarily owing to continuous variations in the unknown surface topography. This study proposes a free-form surface measurement method with laser differential confocal precise positioning, enabling high-precision zero-point positioning, position tracking, and single-point contour scanning of the free-form surface topography. The proposed method addresses the challenge of high-precision and large-range measurements through non-contact and rapid surface shape detection. In this study, a free-form surface measurement system with precise differential confocal positioning was developed. Theoretical analysis and preliminary experiments show that the axial resolution of the differential confocal sensor and laser interferometer was 1 nm; the measurement angle ranges of the laser interferometer and the phase-sensitive demodulator were ± 4° and ± 20°, respectively. The composite uncertainty of the sensor using this method was 12.4 nm. This offers a new approach for high-precision, automatic, and rapid measurement of free-form surfaces, with potential applications in the field of optical manufacturing.
AB - For free-form surfaces with multiple degrees of freedom, conventional interferometric detection methods face challenges in achieving dynamic detection during the machining process, primarily owing to continuous variations in the unknown surface topography. This study proposes a free-form surface measurement method with laser differential confocal precise positioning, enabling high-precision zero-point positioning, position tracking, and single-point contour scanning of the free-form surface topography. The proposed method addresses the challenge of high-precision and large-range measurements through non-contact and rapid surface shape detection. In this study, a free-form surface measurement system with precise differential confocal positioning was developed. Theoretical analysis and preliminary experiments show that the axial resolution of the differential confocal sensor and laser interferometer was 1 nm; the measurement angle ranges of the laser interferometer and the phase-sensitive demodulator were ± 4° and ± 20°, respectively. The composite uncertainty of the sensor using this method was 12.4 nm. This offers a new approach for high-precision, automatic, and rapid measurement of free-form surfaces, with potential applications in the field of optical manufacturing.
KW - Differential confocal
KW - High precision
KW - Laser interference
KW - Position tracking
UR - http://www.scopus.com/inward/record.url?scp=85212095139&partnerID=8YFLogxK
U2 - 10.1016/j.optlastec.2024.112325
DO - 10.1016/j.optlastec.2024.112325
M3 - Article
AN - SCOPUS:85212095139
SN - 0030-3992
VL - 183
JO - Optics and Laser Technology
JF - Optics and Laser Technology
M1 - 112325
ER -