TY - JOUR
T1 - Fourier transform infrared spectrometer based on an electrothermal MEMS mirror
AU - Wang, Donglin
AU - Liu, Hongqiong
AU - Zhang, Jicheng
AU - Chen, Qiao
AU - Wang, Wei
AU - Zhang, Xiaoyang
AU - Xie, Huikai
N1 - Publisher Copyright:
© 2018 Optical Society of America.
PY - 2018/7/20
Y1 - 2018/7/20
N2 - This paper presents a micro Fourier transform infrared spectrometer (μFTIR), enabled by an H-shaped electrothermal microelectromechanical systems (MEMS) mirror. A special driving method was developed for obtaining a linear, uniform-speed motion of 186 μm, and the tilting angle of the MEMS mirror was as small as 0.06°, so there was no need of complex closed-loop control. A telecentric lens was employed in the interferometer of the μFTIR to reduce the influence of the MEMS mirror tilting effect. Also, a new phase interpolation algorithm, instead of the traditional fringe interval method, was applied in the process of the spectral reconstruction to improve the spectral stability. Finally, the new μFTIR was applied in the composition prediction of soybeans, and the experimental results show that it can accurately measure grain moisture, protein, and fat contents.
AB - This paper presents a micro Fourier transform infrared spectrometer (μFTIR), enabled by an H-shaped electrothermal microelectromechanical systems (MEMS) mirror. A special driving method was developed for obtaining a linear, uniform-speed motion of 186 μm, and the tilting angle of the MEMS mirror was as small as 0.06°, so there was no need of complex closed-loop control. A telecentric lens was employed in the interferometer of the μFTIR to reduce the influence of the MEMS mirror tilting effect. Also, a new phase interpolation algorithm, instead of the traditional fringe interval method, was applied in the process of the spectral reconstruction to improve the spectral stability. Finally, the new μFTIR was applied in the composition prediction of soybeans, and the experimental results show that it can accurately measure grain moisture, protein, and fat contents.
UR - http://www.scopus.com/inward/record.url?scp=85050213820&partnerID=8YFLogxK
U2 - 10.1364/AO.57.005956
DO - 10.1364/AO.57.005956
M3 - Article
C2 - 30118019
AN - SCOPUS:85050213820
SN - 1559-128X
VL - 57
SP - 5951
EP - 5961
JO - Applied Optics
JF - Applied Optics
IS - 21
ER -