Fourier transform infrared spectrometer based on an electrothermal MEMS mirror

Donglin Wang; Hongqiong Liu; Jicheng Zhang; Qiao Chen; Wei Wang; Xiaoyang Zhang; Huikai Xie

doi:10.1364/AO.57.005956

Fourier transform infrared spectrometer based on an electrothermal MEMS mirror

Donglin Wang^*, Hongqiong Liu, Jicheng Zhang, Qiao Chen, Wei Wang, Xiaoyang Zhang, Huikai Xie

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

This paper presents a micro Fourier transform infrared spectrometer (μFTIR), enabled by an H-shaped electrothermal microelectromechanical systems (MEMS) mirror. A special driving method was developed for obtaining a linear, uniform-speed motion of 186 μm, and the tilting angle of the MEMS mirror was as small as 0.06°, so there was no need of complex closed-loop control. A telecentric lens was employed in the interferometer of the μFTIR to reduce the influence of the MEMS mirror tilting effect. Also, a new phase interpolation algorithm, instead of the traditional fringe interval method, was applied in the process of the spectral reconstruction to improve the spectral stability. Finally, the new μFTIR was applied in the composition prediction of soybeans, and the experimental results show that it can accurately measure grain moisture, protein, and fat contents.

Original language	English
Pages (from-to)	5951-5961
Number of pages	11
Journal	Applied Optics
Volume	57
Issue number	21
DOIs	https://doi.org/10.1364/AO.57.005956
Publication status	Published - 20 Jul 2018
Externally published	Yes

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title = "Fourier transform infrared spectrometer based on an electrothermal MEMS mirror",

abstract = "This paper presents a micro Fourier transform infrared spectrometer (μFTIR), enabled by an H-shaped electrothermal microelectromechanical systems (MEMS) mirror. A special driving method was developed for obtaining a linear, uniform-speed motion of 186 μm, and the tilting angle of the MEMS mirror was as small as 0.06°, so there was no need of complex closed-loop control. A telecentric lens was employed in the interferometer of the μFTIR to reduce the influence of the MEMS mirror tilting effect. Also, a new phase interpolation algorithm, instead of the traditional fringe interval method, was applied in the process of the spectral reconstruction to improve the spectral stability. Finally, the new μFTIR was applied in the composition prediction of soybeans, and the experimental results show that it can accurately measure grain moisture, protein, and fat contents.",

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AU - Wang, Donglin

AU - Liu, Hongqiong

AU - Zhang, Jicheng

AU - Chen, Qiao

AU - Wang, Wei

AU - Zhang, Xiaoyang

AU - Xie, Huikai

PY - 2018/7/20

Y1 - 2018/7/20

N2 - This paper presents a micro Fourier transform infrared spectrometer (μFTIR), enabled by an H-shaped electrothermal microelectromechanical systems (MEMS) mirror. A special driving method was developed for obtaining a linear, uniform-speed motion of 186 μm, and the tilting angle of the MEMS mirror was as small as 0.06°, so there was no need of complex closed-loop control. A telecentric lens was employed in the interferometer of the μFTIR to reduce the influence of the MEMS mirror tilting effect. Also, a new phase interpolation algorithm, instead of the traditional fringe interval method, was applied in the process of the spectral reconstruction to improve the spectral stability. Finally, the new μFTIR was applied in the composition prediction of soybeans, and the experimental results show that it can accurately measure grain moisture, protein, and fat contents.

AB - This paper presents a micro Fourier transform infrared spectrometer (μFTIR), enabled by an H-shaped electrothermal microelectromechanical systems (MEMS) mirror. A special driving method was developed for obtaining a linear, uniform-speed motion of 186 μm, and the tilting angle of the MEMS mirror was as small as 0.06°, so there was no need of complex closed-loop control. A telecentric lens was employed in the interferometer of the μFTIR to reduce the influence of the MEMS mirror tilting effect. Also, a new phase interpolation algorithm, instead of the traditional fringe interval method, was applied in the process of the spectral reconstruction to improve the spectral stability. Finally, the new μFTIR was applied in the composition prediction of soybeans, and the experimental results show that it can accurately measure grain moisture, protein, and fat contents.

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JF - Applied Optics

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Fourier transform infrared spectrometer based on an electrothermal MEMS mirror

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