Abstract
Metal micropatterns with good conductivity are directly written on various nonplanar substrates by immersion in a metal-salt solution and laser-induced electroless plating. The line width is adjusted by control of the laser power. A microheater inside a microchannel is fabricated for use in small-region temperature regulation.
Original language | English |
---|---|
Pages (from-to) | 1762-1766 |
Number of pages | 5 |
Journal | Small |
Volume | 6 |
Issue number | 16 |
DOIs | |
Publication status | Published - 16 Aug 2010 |
Externally published | Yes |
Keywords
- Electroless plating
- Interconnects
- Microheaters
- Nanowires
- Nonplanar substrates