Fiber point diffraction interferometer in measurement of spherical lens

Shuo Wu; Tao Geng Zhou; Jia Ming Lin; Lin Feng Chen; Liang Nie; Ding Guo Sha

doi:10.1117/12.791112

Fiber point diffraction interferometer in measurement of spherical lens

Shuo Wu^*
, Tao Geng Zhou
, Jia Ming Lin
, Lin Feng Chen
, Liang Nie
, Ding Guo Sha

^*Corresponding author for this work

School of Optics and Photonics

Beijing Institute of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Citations (Scopus)

Abstract

An advanced fiber point diffraction interferometer (FPDI) is built for measuring spherical mirror surface and spherical lens wave front aberration with high precision. This new interferometer is based on point diffraction technique. Using short coherence length laser as light source, the perfect spherical wave diffracts from fiber point resource as reference wave. And the spherical wave is interfered with object wave to achieve higher accuracy. A phase shifting point diffraction interferometer with one single-mode-optical- fiber is built for measuring concave spherical mirror surface. A concave spherical mirror is measured by the experimental facility. The interferograms are collected by CCD and analyzed by computer. The PV values and RMS values of resulted surface error are compared with the result acquired by digital wave front interferometer. The measured surface is fitted and represented by Zernike polynomials. The results compared with Zygo GPI interferometer are proximately the same. Finally the differences between them are discussed in detail. To measure the aberration of spherical lens, a two single-mode-optical-fibers point diffraction interferometer is built by adding another single mode optical fiber. A convex lens is measured. The interferograms is presented.

Original language	English
Title of host publication	International Symposium on Photoelectronic Detection and Imaging 2007
Subtitle of host publication	Optoelectronic System Design, Manufacturing, and Testing
DOIs	https://doi.org/10.1117/12.791112
Publication status	Published - 2008
Event	International Symposium on Photoelectronic Detection and Imaging, ISPDI 2007: Optoelectronic System Design, Manufacturing, and Testings - Beijing, China Duration: 9 Sept 2007 → 12 Sept 2007

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6624
ISSN (Print)	0277-786X

Conference

Conference	International Symposium on Photoelectronic Detection and Imaging, ISPDI 2007: Optoelectronic System Design, Manufacturing, and Testings
Country/Territory	China
City	Beijing
Period	9/09/07 → 12/09/07

Keywords

FPDI
Optical measurement
Point diffraction technique
Spherical lens measurement
Wave front aberration

Access to Document

10.1117/12.791112

Cite this

Wu, S., Zhou, T. G., Lin, J. M., Chen, L. F., Nie, L., & Sha, D. G. (2008). Fiber point diffraction interferometer in measurement of spherical lens. In International Symposium on Photoelectronic Detection and Imaging 2007: Optoelectronic System Design, Manufacturing, and Testing Article 662415 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6624). https://doi.org/10.1117/12.791112

@inproceedings{3953851cd2614e32b0a6ac2f0b9e402e,

title = "Fiber point diffraction interferometer in measurement of spherical lens",

abstract = "An advanced fiber point diffraction interferometer (FPDI) is built for measuring spherical mirror surface and spherical lens wave front aberration with high precision. This new interferometer is based on point diffraction technique. Using short coherence length laser as light source, the perfect spherical wave diffracts from fiber point resource as reference wave. And the spherical wave is interfered with object wave to achieve higher accuracy. A phase shifting point diffraction interferometer with one single-mode-optical- fiber is built for measuring concave spherical mirror surface. A concave spherical mirror is measured by the experimental facility. The interferograms are collected by CCD and analyzed by computer. The PV values and RMS values of resulted surface error are compared with the result acquired by digital wave front interferometer. The measured surface is fitted and represented by Zernike polynomials. The results compared with Zygo GPI interferometer are proximately the same. Finally the differences between them are discussed in detail. To measure the aberration of spherical lens, a two single-mode-optical-fibers point diffraction interferometer is built by adding another single mode optical fiber. A convex lens is measured. The interferograms is presented.",

keywords = "FPDI, Optical measurement, Point diffraction technique, Spherical lens measurement, Wave front aberration",

author = "Shuo Wu and Zhou, \{Tao Geng\} and Lin, \{Jia Ming\} and Chen, \{Lin Feng\} and Liang Nie and Sha, \{Ding Guo\}",

year = "2008",

doi = "10.1117/12.791112",

language = "English",

isbn = "9780819467669",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "International Symposium on Photoelectronic Detection and Imaging 2007",

note = "International Symposium on Photoelectronic Detection and Imaging, ISPDI 2007: Optoelectronic System Design, Manufacturing, and Testings ; Conference date: 09-09-2007 Through 12-09-2007",

}

Wu, S, Zhou, TG, Lin, JM, Chen, LF, Nie, L & Sha, DG 2008, Fiber point diffraction interferometer in measurement of spherical lens. in International Symposium on Photoelectronic Detection and Imaging 2007: Optoelectronic System Design, Manufacturing, and Testing., 662415, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6624, International Symposium on Photoelectronic Detection and Imaging, ISPDI 2007: Optoelectronic System Design, Manufacturing, and Testings, Beijing, China, 9/09/07. https://doi.org/10.1117/12.791112

Fiber point diffraction interferometer in measurement of spherical lens. / Wu, Shuo; Zhou, Tao Geng; Lin, Jia Ming et al.
International Symposium on Photoelectronic Detection and Imaging 2007: Optoelectronic System Design, Manufacturing, and Testing. 2008. 662415 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6624).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Fiber point diffraction interferometer in measurement of spherical lens

AU - Wu, Shuo

AU - Zhou, Tao Geng

AU - Lin, Jia Ming

AU - Chen, Lin Feng

AU - Nie, Liang

AU - Sha, Ding Guo

PY - 2008

Y1 - 2008

N2 - An advanced fiber point diffraction interferometer (FPDI) is built for measuring spherical mirror surface and spherical lens wave front aberration with high precision. This new interferometer is based on point diffraction technique. Using short coherence length laser as light source, the perfect spherical wave diffracts from fiber point resource as reference wave. And the spherical wave is interfered with object wave to achieve higher accuracy. A phase shifting point diffraction interferometer with one single-mode-optical- fiber is built for measuring concave spherical mirror surface. A concave spherical mirror is measured by the experimental facility. The interferograms are collected by CCD and analyzed by computer. The PV values and RMS values of resulted surface error are compared with the result acquired by digital wave front interferometer. The measured surface is fitted and represented by Zernike polynomials. The results compared with Zygo GPI interferometer are proximately the same. Finally the differences between them are discussed in detail. To measure the aberration of spherical lens, a two single-mode-optical-fibers point diffraction interferometer is built by adding another single mode optical fiber. A convex lens is measured. The interferograms is presented.

AB - An advanced fiber point diffraction interferometer (FPDI) is built for measuring spherical mirror surface and spherical lens wave front aberration with high precision. This new interferometer is based on point diffraction technique. Using short coherence length laser as light source, the perfect spherical wave diffracts from fiber point resource as reference wave. And the spherical wave is interfered with object wave to achieve higher accuracy. A phase shifting point diffraction interferometer with one single-mode-optical- fiber is built for measuring concave spherical mirror surface. A concave spherical mirror is measured by the experimental facility. The interferograms are collected by CCD and analyzed by computer. The PV values and RMS values of resulted surface error are compared with the result acquired by digital wave front interferometer. The measured surface is fitted and represented by Zernike polynomials. The results compared with Zygo GPI interferometer are proximately the same. Finally the differences between them are discussed in detail. To measure the aberration of spherical lens, a two single-mode-optical-fibers point diffraction interferometer is built by adding another single mode optical fiber. A convex lens is measured. The interferograms is presented.

KW - FPDI

KW - Optical measurement

KW - Point diffraction technique

KW - Spherical lens measurement

KW - Wave front aberration

UR - https://www.scopus.com/pages/publications/41149158080

U2 - 10.1117/12.791112

DO - 10.1117/12.791112

M3 - Conference contribution

AN - SCOPUS:41149158080

SN - 9780819467669

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - International Symposium on Photoelectronic Detection and Imaging 2007

T2 - International Symposium on Photoelectronic Detection and Imaging, ISPDI 2007: Optoelectronic System Design, Manufacturing, and Testings

Y2 - 9 September 2007 through 12 September 2007

ER -

Fiber point diffraction interferometer in measurement of spherical lens

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