Fiber faceplate modulation readout in Bi-material micro-cantilever mirror array imaging system

  • Mei Hui*
  • , Zhengzheng Xia
  • , Ming Liu
  • , Liquan Dong
  • , Xiaohua Liu
  • , Yuejin Zhao
  • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Fiber faceplate modulation was applied to read out the precise actuation of silicon-based, surface micro-fabricated cantilever mirrors array in optical imaging system. The faceplate was made by ordered bundles consisting of as many as ten thousands fibers. The transmission loss of an individual fiber in the bundles was 0.35dB/cm and the cross talk between neighboring fibers in the faceplate was about 15%. Micro-cantilever mirrors array (Focal-Plane Array (FPA)) which composed of two-level bi-material pixels, absorb incident infrared flux and result in a temperature increase. The temperature distribution of incident flux transformed to the deformation distribution in FPA which has a very big difference in coefficients of thermal expansion. FPA plays the roles of target sensing and has the characteristics of high detection sensitivity. Instead of general filter such as knife edge or pinhole, fiber faceplate modulate the beam reflected by the units of FPA. An optical readout signal brings a visible spectrum into pattern recognition system, yielding a visible image on monitor. Thermal images at room temperature have been obtained. The proposed method permits optical axis compact and image noise suppression.

Original languageEnglish
Title of host publicationDimensional Optical Metrology and Inspection for Practical Applications V
EditorsKevin G. Harding, Song Zhang
PublisherSPIE
ISBN (Electronic)9781510601093
DOIs
Publication statusPublished - 2016
EventDimensional Optical Metrology and Inspection for Practical Applications V - Baltimore, United States
Duration: 20 Apr 2016 → …

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume9868
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceDimensional Optical Metrology and Inspection for Practical Applications V
Country/TerritoryUnited States
CityBaltimore
Period20/04/16 → …

Keywords

  • Bi-material
  • Fiber faceplate
  • Micro cantilever
  • Mirror array

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