Abstract
A new structure for the characterization of the permittivity of ferroelectric thin films at microwave frequencies is proposed. This new structure involves a coplanar waveguide (CPW) bandstop filter based on a ferroelectric thin film. Using the resonant frequency and Q value of the CPW bandstop filter, the dielectric constant (ε) and the loss tangent (tan δ) of the ferroelectric thin film were determined by comparing the measured responses with simulated results. To demonstrate this new structure, a CPW bandstop filter was fabricated on MgO substrate coated with Ba 0.5Sr 0.5TiO 3 (BST-0.5). The dielectric parameters determined as a function of temperature and external bias are reported.
| Original language | English |
|---|---|
| Pages (from-to) | 379-385 |
| Number of pages | 7 |
| Journal | Physica Status Solidi (A) Applications and Materials Science |
| Volume | 203 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - Feb 2006 |
| Externally published | Yes |