Ferroelectric thin-film characterization using a coplanar waveguide bandstop filter

  • Qingduan Meng*
  • , Xueqiang Zhang
  • , Fei Li
  • , Jiandong Huang
  • , Xiaohong Zhu
  • , Dongning Zheng
  • , Bolin Cheng
  • , Qiang Luo
  • , Changzhi Gu
  • , Yusheng He
  • *Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

A new structure for the characterization of the permittivity of ferroelectric thin films at microwave frequencies is proposed. This new structure involves a coplanar waveguide (CPW) bandstop filter based on a ferroelectric thin film. Using the resonant frequency and Q value of the CPW bandstop filter, the dielectric constant (ε) and the loss tangent (tan δ) of the ferroelectric thin film were determined by comparing the measured responses with simulated results. To demonstrate this new structure, a CPW bandstop filter was fabricated on MgO substrate coated with Ba 0.5Sr 0.5TiO 3 (BST-0.5). The dielectric parameters determined as a function of temperature and external bias are reported.

Original languageEnglish
Pages (from-to)379-385
Number of pages7
JournalPhysica Status Solidi (A) Applications and Materials Science
Volume203
Issue number2
DOIs
Publication statusPublished - Feb 2006
Externally publishedYes

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