@inproceedings{26c24dcf98584f3399bef684612f4502,
title = "Femtosecond laser microchannels fabrication based on electrons dynamics control using temporally or spatially shaped pulses",
abstract = "With ultrashort pulse durations and ultrahigh power densities, femtosecond laser presents unique advantages of high precision and high quality fabrication of microchannels in transparent materials. In our study, by shaping femtosecond laser pulse energy distribution in temporal or spatial domains, localized transient electrons dynamics and the subsequent processes, such as phase changes, can be controlled, leading to the dramatic increases in the capability of femtosecond laser microchannels fabrication. The temporally shaped femtosecond laser pulse trains can significantly enhance the material removal rate in both water-assisted femtosecond laser drilling and femtosecond laser irradiation followed by chemical etching. Besides, high-aspect-ratio and small-diameter microchannels are drilled by spatially shaped femtosecond laser pulses.",
keywords = "Femtosecond laser, electrons dynamics control, microchannels fabrication, pulse shaping",
author = "Xueliang Yan and Jie Hu and Xiaowei Li and Bo Xia and Pengjun Liu and Yongfeng Lu and Lan Jiang",
note = "Publisher Copyright: {\textcopyright} 2014 SPIE.; High-Power Lasers and Applications VII ; Conference date: 09-10-2014 Through 11-10-2014",
year = "2014",
doi = "10.1117/12.2071591",
language = "English",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Walter, \{Robert F.\} and Ruxin Li and Singh, \{Upendra N.\}",
booktitle = "High-Power Lasers and Applications VII",
address = "United States",
}