Feasibility of new micro-MEMS cryogenic refrigerator

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	51
Number of pages	1
Journal	Weixi Jiagong Jishu/Microfabrication Technology
Issue number	4
Publication status	Published - Dec 2003
Externally published	Yes

Cite this

@article{d0ccd48b725c41b19d2b38962c5fd129,

title = "Feasibility of new micro-MEMS cryogenic refrigerator",

author = "Li, \{Yan Qiu\} and Liu, \{Shao Bo\} and Liu, \{Mei Dong\} and Zeng, \{Yi Ke\}",

year = "2003",

month = dec,

language = "English",

pages = "51",

journal = "Weixi Jiagong Jishu/Microfabrication Technology",

issn = "1003-8213",

publisher = "Weixi Jiagong Jishu",

number = "4",

}

TY - JOUR

T1 - Feasibility of new micro-MEMS cryogenic refrigerator

AU - Li, Yan Qiu

AU - Liu, Shao Bo

AU - Liu, Mei Dong

AU - Zeng, Yi Ke

PY - 2003/12

Y1 - 2003/12

UR - https://www.scopus.com/pages/publications/1242283787

M3 - Article

AN - SCOPUS:1242283787

SN - 1003-8213

SP - 51

JO - Weixi Jiagong Jishu/Microfabrication Technology

JF - Weixi Jiagong Jishu/Microfabrication Technology

IS - 4

ER -