Fabrication of piezoelectric cantilever beam based on nanostructured PZT film

Hongmei Liu; Quanliang Zhao; Chengjun Qiu; Maosheng Cao

doi:10.4028/0-87849-473-1.223

Fabrication of piezoelectric cantilever beam based on nanostructured PZT film

Hongmei Liu^*
, Quanliang Zhao
, Chengjun Qiu
, Maosheng Cao

^*Corresponding author for this work

School of Material Science and Engineering

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

A sol-gel technology to fabricate PZT thick film for cantilever beam was investigated. In this process, PZT nano-powder is dispersed into a PZT sol solution, which is identical with the powder in composition, and then the PZT suspension and clean PZT sol solution were deposited alternately on an Au/Cr/Si02/Si substrate using spin-coating route. Above process was repeated in order to deposit the desired thickness. The results showed that the perovskite PZT thick film with thickness of about 4 μm was obtained after annealing at 650 °C for 2 h and it has the saturation polarization of 54 μC/cm ², the remnant polarization of 30 μC/cm² and the coercive field of 50 kV/cm.

Original language	English
Pages (from-to)	223-225
Number of pages	3
Journal	Key Engineering Materials
Volume	368-372 PART 1
DOIs	https://doi.org/10.4028/0-87849-473-1.223
Publication status	Published - 2008

Keywords

Cantilever beam
PZT
Sol-gel
Thick film

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10.4028/0-87849-473-1.223

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title = "Fabrication of piezoelectric cantilever beam based on nanostructured PZT film",

abstract = "A sol-gel technology to fabricate PZT thick film for cantilever beam was investigated. In this process, PZT nano-powder is dispersed into a PZT sol solution, which is identical with the powder in composition, and then the PZT suspension and clean PZT sol solution were deposited alternately on an Au/Cr/Si02/Si substrate using spin-coating route. Above process was repeated in order to deposit the desired thickness. The results showed that the perovskite PZT thick film with thickness of about 4 μm was obtained after annealing at 650 °C for 2 h and it has the saturation polarization of 54 μC/cm 2, the remnant polarization of 30 μC/cm2 and the coercive field of 50 kV/cm.",

keywords = "Cantilever beam, PZT, Sol-gel, Thick film",

author = "Hongmei Liu and Quanliang Zhao and Chengjun Qiu and Maosheng Cao",

year = "2008",

doi = "10.4028/0-87849-473-1.223",

language = "English",

volume = "368-372 PART 1",

pages = "223--225",

journal = "Key Engineering Materials",

issn = "1013-9826",

publisher = "Trans Tech Publications Ltd.",

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TY - JOUR

T1 - Fabrication of piezoelectric cantilever beam based on nanostructured PZT film

AU - Liu, Hongmei

AU - Zhao, Quanliang

AU - Qiu, Chengjun

AU - Cao, Maosheng

PY - 2008

Y1 - 2008

N2 - A sol-gel technology to fabricate PZT thick film for cantilever beam was investigated. In this process, PZT nano-powder is dispersed into a PZT sol solution, which is identical with the powder in composition, and then the PZT suspension and clean PZT sol solution were deposited alternately on an Au/Cr/Si02/Si substrate using spin-coating route. Above process was repeated in order to deposit the desired thickness. The results showed that the perovskite PZT thick film with thickness of about 4 μm was obtained after annealing at 650 °C for 2 h and it has the saturation polarization of 54 μC/cm 2, the remnant polarization of 30 μC/cm2 and the coercive field of 50 kV/cm.

AB - A sol-gel technology to fabricate PZT thick film for cantilever beam was investigated. In this process, PZT nano-powder is dispersed into a PZT sol solution, which is identical with the powder in composition, and then the PZT suspension and clean PZT sol solution were deposited alternately on an Au/Cr/Si02/Si substrate using spin-coating route. Above process was repeated in order to deposit the desired thickness. The results showed that the perovskite PZT thick film with thickness of about 4 μm was obtained after annealing at 650 °C for 2 h and it has the saturation polarization of 54 μC/cm 2, the remnant polarization of 30 μC/cm2 and the coercive field of 50 kV/cm.

KW - Cantilever beam

KW - PZT

KW - Sol-gel

KW - Thick film

UR - https://www.scopus.com/pages/publications/40949093100

U2 - 10.4028/0-87849-473-1.223

DO - 10.4028/0-87849-473-1.223

M3 - Article

AN - SCOPUS:40949093100

SN - 1013-9826

VL - 368-372 PART 1

SP - 223

EP - 225

JO - Key Engineering Materials

JF - Key Engineering Materials

ER -

Fabrication of piezoelectric cantilever beam based on nanostructured PZT film

Abstract

Keywords

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