Fabrication and characterization of half-kerfed LiNbO 3-based high-frequency (>100MHz) ultrasonic array transducers

J. Y. Zhang; W. J. Xu; J. Carlier; X. M. Ji; B. Nongaillard; S. Queste; J. Zhou; Y. P. Huang

doi:10.1109/ULTSYM.2011.0431

Fabrication and characterization of half-kerfed LiNbO ₃-based high-frequency (>100MHz) ultrasonic array transducers

J. Y. Zhang
, W. J. Xu^*
, J. Carlier
, X. M. Ji
, B. Nongaillard
, S. Queste
, J. Zhou
, Y. P. Huang

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Citations (Scopus)

Abstract

The effect of kerf depth is investigated on the performances of array transducers. A finite element tool, COMSOL, is employed to simulate the properties of acoustic field and to calculate the electrical properties of the arrays, including crosstalk effect and electrical impedance. Furthermore, Inductively Coupled Plasma (ICP) deep etching process is used to etch 36°/Y-cut lithium niobate (LiNbO ₃) crystals and the limitation of etching aspect ratio is studied. Several arrays with different profiles are realized under optimized processes. At last, arrays with different pitches are fabricated and characterized by a network analyzer.

Original language	English
Title of host publication	2011 IEEE International Ultrasonics Symposium, IUS 2011
Pages	1727-1730
Number of pages	4
DOIs	https://doi.org/10.1109/ULTSYM.2011.0431
Publication status	Published - 2011
Externally published	Yes
Event	2011 IEEE International Ultrasonics Symposium, IUS 2011 - Orlando, FL, United States Duration: 18 Oct 2011 → 21 Oct 2011

Publication series

Name	IEEE International Ultrasonics Symposium, IUS
ISSN (Print)	1948-5719
ISSN (Electronic)	1948-5727

Conference

Conference	2011 IEEE International Ultrasonics Symposium, IUS 2011
Country/Territory	United States
City	Orlando, FL
Period	18/10/11 → 21/10/11

Access to Document

10.1109/ULTSYM.2011.0431

Cite this

Zhang, J. Y., Xu, W. J., Carlier, J., Ji, X. M., Nongaillard, B., Queste, S., Zhou, J., & Huang, Y. P. (2011). Fabrication and characterization of half-kerfed LiNbO ₃-based high-frequency (>100MHz) ultrasonic array transducers. In 2011 IEEE International Ultrasonics Symposium, IUS 2011 (pp. 1727-1730). Article 6293300 (IEEE International Ultrasonics Symposium, IUS). https://doi.org/10.1109/ULTSYM.2011.0431

@inproceedings{108bc96b0c1a4f8a9f4e6208c7deb879,

title = "Fabrication and characterization of half-kerfed LiNbO 3-based high-frequency (>100MHz) ultrasonic array transducers",

abstract = "The effect of kerf depth is investigated on the performances of array transducers. A finite element tool, COMSOL, is employed to simulate the properties of acoustic field and to calculate the electrical properties of the arrays, including crosstalk effect and electrical impedance. Furthermore, Inductively Coupled Plasma (ICP) deep etching process is used to etch 36°/Y-cut lithium niobate (LiNbO 3) crystals and the limitation of etching aspect ratio is studied. Several arrays with different profiles are realized under optimized processes. At last, arrays with different pitches are fabricated and characterized by a network analyzer.",

author = "Zhang, \{J. Y.\} and Xu, \{W. J.\} and J. Carlier and Ji, \{X. M.\} and B. Nongaillard and S. Queste and J. Zhou and Huang, \{Y. P.\}",

year = "2011",

doi = "10.1109/ULTSYM.2011.0431",

language = "English",

isbn = "9781457712531",

series = "IEEE International Ultrasonics Symposium, IUS",

pages = "1727--1730",

booktitle = "2011 IEEE International Ultrasonics Symposium, IUS 2011",

note = "2011 IEEE International Ultrasonics Symposium, IUS 2011 ; Conference date: 18-10-2011 Through 21-10-2011",

}

Zhang, JY, Xu, WJ, Carlier, J, Ji, XM, Nongaillard, B, Queste, S, Zhou, J & Huang, YP 2011, Fabrication and characterization of half-kerfed LiNbO ₃-based high-frequency (>100MHz) ultrasonic array transducers. in 2011 IEEE International Ultrasonics Symposium, IUS 2011., 6293300, IEEE International Ultrasonics Symposium, IUS, pp. 1727-1730, 2011 IEEE International Ultrasonics Symposium, IUS 2011, Orlando, FL, United States, 18/10/11. https://doi.org/10.1109/ULTSYM.2011.0431

Fabrication and characterization of half-kerfed LiNbO ₃-based high-frequency (>100MHz) ultrasonic array transducers. / Zhang, J. Y.; Xu, W. J.; Carlier, J. et al.
2011 IEEE International Ultrasonics Symposium, IUS 2011. 2011. p. 1727-1730 6293300 (IEEE International Ultrasonics Symposium, IUS).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Zhang, J. Y.

AU - Xu, W. J.

AU - Carlier, J.

AU - Ji, X. M.

AU - Nongaillard, B.

AU - Queste, S.

AU - Zhou, J.

AU - Huang, Y. P.

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AB - The effect of kerf depth is investigated on the performances of array transducers. A finite element tool, COMSOL, is employed to simulate the properties of acoustic field and to calculate the electrical properties of the arrays, including crosstalk effect and electrical impedance. Furthermore, Inductively Coupled Plasma (ICP) deep etching process is used to etch 36°/Y-cut lithium niobate (LiNbO 3) crystals and the limitation of etching aspect ratio is studied. Several arrays with different profiles are realized under optimized processes. At last, arrays with different pitches are fabricated and characterized by a network analyzer.

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