Experimental study on the emission spectra of microwave plasma at atmospheric pressure

Boya Zhang; Qiang Wang; Guixin Zhang; Shanshan Liao

doi:10.1063/1.4863119

Experimental study on the emission spectra of microwave plasma at atmospheric pressure

Boya Zhang, Qiang Wang, Guixin Zhang^*, Shanshan Liao

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

25 Citations (Scopus)

Abstract

An experimental study on microwave plasma at atmospheric pressure was conducted by employing optical emission spectroscopy. Based on a microwave plasma generation device developed for nanoparticle synthesis, we studied the influence of input microwave power and gas flow rate on the optical emission behaviors and electron temperature of plasma using Ar, He, and N₂as working gas, respectively. The physics behind these behaviors was discussed. The results are useful in characterizing microwave plasma at atmospheric pressure and can be used for improving nanoparticle synthesis system for commercial use in the future.

Original language	English
Article number	043302
Journal	Journal of Applied Physics
Volume	115
Issue number	4
DOIs	https://doi.org/10.1063/1.4863119
Publication status	Published - 28 Jan 2014
Externally published	Yes

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10.1063/1.4863119

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@article{67b6c5d12b4f413ab54711161bd933c9,

title = "Experimental study on the emission spectra of microwave plasma at atmospheric pressure",

abstract = "An experimental study on microwave plasma at atmospheric pressure was conducted by employing optical emission spectroscopy. Based on a microwave plasma generation device developed for nanoparticle synthesis, we studied the influence of input microwave power and gas flow rate on the optical emission behaviors and electron temperature of plasma using Ar, He, and N2as working gas, respectively. The physics behind these behaviors was discussed. The results are useful in characterizing microwave plasma at atmospheric pressure and can be used for improving nanoparticle synthesis system for commercial use in the future.",

author = "Boya Zhang and Qiang Wang and Guixin Zhang and Shanshan Liao",

note = "Publisher Copyright: {\textcopyright} 2014 AIP Publishing LLC.",

year = "2014",

month = jan,

day = "28",

doi = "10.1063/1.4863119",

language = "English",

volume = "115",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "4",

}

TY - JOUR

T1 - Experimental study on the emission spectra of microwave plasma at atmospheric pressure

AU - Zhang, Boya

AU - Wang, Qiang

AU - Zhang, Guixin

AU - Liao, Shanshan

PY - 2014/1/28

Y1 - 2014/1/28

N2 - An experimental study on microwave plasma at atmospheric pressure was conducted by employing optical emission spectroscopy. Based on a microwave plasma generation device developed for nanoparticle synthesis, we studied the influence of input microwave power and gas flow rate on the optical emission behaviors and electron temperature of plasma using Ar, He, and N2as working gas, respectively. The physics behind these behaviors was discussed. The results are useful in characterizing microwave plasma at atmospheric pressure and can be used for improving nanoparticle synthesis system for commercial use in the future.

AB - An experimental study on microwave plasma at atmospheric pressure was conducted by employing optical emission spectroscopy. Based on a microwave plasma generation device developed for nanoparticle synthesis, we studied the influence of input microwave power and gas flow rate on the optical emission behaviors and electron temperature of plasma using Ar, He, and N2as working gas, respectively. The physics behind these behaviors was discussed. The results are useful in characterizing microwave plasma at atmospheric pressure and can be used for improving nanoparticle synthesis system for commercial use in the future.

UR - https://www.scopus.com/pages/publications/84907546298

U2 - 10.1063/1.4863119

DO - 10.1063/1.4863119

M3 - Article

AN - SCOPUS:84907546298

SN - 0021-8979

VL - 115

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 4

M1 - 043302

ER -

Experimental study on the emission spectra of microwave plasma at atmospheric pressure

Abstract

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