TY - GEN
T1 - Experimental research on laser material processing used in quartz MEMS gyroscope
AU - Zhao, Ke
AU - Wang, Qianqian
AU - Feng, Lihui
AU - Wang, Benguo
AU - Cui, Fang
PY - 2013
Y1 - 2013
N2 - This paper expresses the laser material processing technology used in quartz double-H gyroscope. This processing method can be used to depress mechanical coupling and change the frequency of gyroscope. The gold masses on gyroscope chip are made by micro-electroplating method. Then, nanosecond laser with 30 ns pulse duration and femtosecond laser with 50 fs pulse duration are used to process the gold masses respectively. Surface qualities of adjustment potions are compared and analyzed. The parameters of laser system are determined. Preliminary trimming with femotsecond laser for depressing mechanical coupling is done, and the quadrature error decreases by 92%, from 1.840 V to 0.143 V. The experimental results provide a basis for depressing mechanical coupling and tuning frequency in the future work.
AB - This paper expresses the laser material processing technology used in quartz double-H gyroscope. This processing method can be used to depress mechanical coupling and change the frequency of gyroscope. The gold masses on gyroscope chip are made by micro-electroplating method. Then, nanosecond laser with 30 ns pulse duration and femtosecond laser with 50 fs pulse duration are used to process the gold masses respectively. Surface qualities of adjustment potions are compared and analyzed. The parameters of laser system are determined. Preliminary trimming with femotsecond laser for depressing mechanical coupling is done, and the quadrature error decreases by 92%, from 1.840 V to 0.143 V. The experimental results provide a basis for depressing mechanical coupling and tuning frequency in the future work.
KW - femtosecond laser
KW - laser material processing
KW - nanosecond laser
KW - quartz MEMS gyroscope
UR - https://www.scopus.com/pages/publications/84883220915
U2 - 10.1109/ICICIP.2013.6568161
DO - 10.1109/ICICIP.2013.6568161
M3 - Conference contribution
AN - SCOPUS:84883220915
SN - 9781467362481
T3 - Proceedings of the 2013 International Conference on Intelligent Control and Information Processing, ICICIP 2013
SP - 689
EP - 693
BT - Proceedings of the 2013 International Conference on Intelligent Control and Information Processing, ICICIP 2013
T2 - 2013 4th International Conference on Intelligent Control and Information Processing, ICICIP 2013
Y2 - 9 June 2013 through 11 June 2013
ER -