@inproceedings{653b26cd76c4491f89aa3c63c4318be2,
title = "Experimental research on anti-vibration interferometry based on time-frequencydomain analysis",
abstract = "Phase-shifting interferometry is a non-contact precision precise measuring method for optical surface, but it is highly sensitive to external vibrations. A time-and-frequency-domain (TFD) anti-noise phase-shifting interferometry is proposed to eliminate the effect of vibrations and improve the precision of measurement. According to simulations and preliminary experiments, active phase-shifting speed as well as interferogram capture speed should be increased to improve the anti-vibration capability of the TFD method. In this paper, a fast phase-shifting approach based on PZT actuator and interferogram detection with high-speed camera is proposed. Preliminary experimental results are given to demonstrate the approach.",
keywords = "Anti-vibration, High-speed camera, Interferometry, PZT-actuator, Phase-shifting",
author = "Yao Hu and Qun Hao and Fanghua Zhang and Yuhan Tian",
year = "2013",
doi = "10.1117/12.2035878",
language = "English",
isbn = "9780819497925",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Sixth International Symposium on Precision Mechanical Measurements",
note = "6th International Symposium on Precision Mechanical Measurements ; Conference date: 08-08-2013 Through 12-08-2013",
}