Excitations of precursor molecules by different laser powers in laser-assisted growth of diamond films

Zhi Qiang Xie; Xiang Nan He; Wei Hu; Thomas Guillemet; Jong Bok Park; Yun Shen Zhou; Jaeil Bai; Yi Gao; Xiao Cheng Zeng; Lan Jiang; Yong Feng Lu

doi:10.1021/cg1010083

Excitations of precursor molecules by different laser powers in laser-assisted growth of diamond films

Zhi Qiang Xie, Xiang Nan He, Wei Hu, Thomas Guillemet, Jong Bok Park, Yun Shen Zhou, Jaeil Bai, Yi Gao, Xiao Cheng Zeng, Lan Jiang, Yong Feng Lu

School of Mechanical Engineering

University of Nebraska-Lincoln

Research output: Contribution to journal › Article › peer-review

17 Citations (Scopus)

Abstract

Excitations of precursor molecules by different laser powers in laser-assisted growth of diamond films using a wavelength-tunable CO₂ laser were studied. The wavelength of the CO₂ laser was tuned to 10.532 μm to match a vibration mode of a precursor molecule, ethylene. The density of the incident laser power was adjusted to modify diamond crystal orientation, optimize diamond quality, and achieve high-efficiency laser energy coupling. It was observed that at incident laser power densities between 5.0 × 10³ and 1.0 × 10⁴ W/cm², (100)-faceted diamond crystals were grown uniformly in the center areas of the diamond films. Higher incident laser powers, although further promoted growth rate, suppressed the uniformity of the diamond (100) facets. Best diamond quality was obtained within a laser power density range of 5.0 × 10 ³ to 6.7 × 10³ W/cm², whereas the highest energy efficiency was achieved within a laser power density range of 3.3 × 10³ to 6.7 × 10³ W/cm². The effects of the resonant laser energy coupling were investigated using optical emission spectroscopy.

Original language	English
Pages (from-to)	4928-4933
Number of pages	6
Journal	Crystal Growth and Design
Volume	10
Issue number	11
DOIs	https://doi.org/10.1021/cg1010083
Publication status	Published - 3 Nov 2010

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1021/cg1010083

Cite this

@article{38e9de489ff34cf582ca5acab8767efd,

title = "Excitations of precursor molecules by different laser powers in laser-assisted growth of diamond films",

abstract = "Excitations of precursor molecules by different laser powers in laser-assisted growth of diamond films using a wavelength-tunable CO2 laser were studied. The wavelength of the CO2 laser was tuned to 10.532 μm to match a vibration mode of a precursor molecule, ethylene. The density of the incident laser power was adjusted to modify diamond crystal orientation, optimize diamond quality, and achieve high-efficiency laser energy coupling. It was observed that at incident laser power densities between 5.0 × 103 and 1.0 × 104 W/cm2, (100)-faceted diamond crystals were grown uniformly in the center areas of the diamond films. Higher incident laser powers, although further promoted growth rate, suppressed the uniformity of the diamond (100) facets. Best diamond quality was obtained within a laser power density range of 5.0 × 10 3 to 6.7 × 103 W/cm2, whereas the highest energy efficiency was achieved within a laser power density range of 3.3 × 103 to 6.7 × 103 W/cm2. The effects of the resonant laser energy coupling were investigated using optical emission spectroscopy.",

author = "Xie, {Zhi Qiang} and He, {Xiang Nan} and Wei Hu and Thomas Guillemet and Park, {Jong Bok} and Zhou, {Yun Shen} and Jaeil Bai and Yi Gao and Zeng, {Xiao Cheng} and Lan Jiang and Lu, {Yong Feng}",

year = "2010",

month = nov,

day = "3",

doi = "10.1021/cg1010083",

language = "English",

volume = "10",

pages = "4928--4933",

journal = "Crystal Growth and Design",

issn = "1528-7483",

publisher = "American Chemical Society",

number = "11",

}

TY - JOUR

T1 - Excitations of precursor molecules by different laser powers in laser-assisted growth of diamond films

AU - Xie, Zhi Qiang

AU - He, Xiang Nan

AU - Hu, Wei

AU - Guillemet, Thomas

AU - Park, Jong Bok

AU - Zhou, Yun Shen

AU - Bai, Jaeil

AU - Gao, Yi

AU - Zeng, Xiao Cheng

AU - Jiang, Lan

AU - Lu, Yong Feng

PY - 2010/11/3

Y1 - 2010/11/3

N2 - Excitations of precursor molecules by different laser powers in laser-assisted growth of diamond films using a wavelength-tunable CO2 laser were studied. The wavelength of the CO2 laser was tuned to 10.532 μm to match a vibration mode of a precursor molecule, ethylene. The density of the incident laser power was adjusted to modify diamond crystal orientation, optimize diamond quality, and achieve high-efficiency laser energy coupling. It was observed that at incident laser power densities between 5.0 × 103 and 1.0 × 104 W/cm2, (100)-faceted diamond crystals were grown uniformly in the center areas of the diamond films. Higher incident laser powers, although further promoted growth rate, suppressed the uniformity of the diamond (100) facets. Best diamond quality was obtained within a laser power density range of 5.0 × 10 3 to 6.7 × 103 W/cm2, whereas the highest energy efficiency was achieved within a laser power density range of 3.3 × 103 to 6.7 × 103 W/cm2. The effects of the resonant laser energy coupling were investigated using optical emission spectroscopy.

AB - Excitations of precursor molecules by different laser powers in laser-assisted growth of diamond films using a wavelength-tunable CO2 laser were studied. The wavelength of the CO2 laser was tuned to 10.532 μm to match a vibration mode of a precursor molecule, ethylene. The density of the incident laser power was adjusted to modify diamond crystal orientation, optimize diamond quality, and achieve high-efficiency laser energy coupling. It was observed that at incident laser power densities between 5.0 × 103 and 1.0 × 104 W/cm2, (100)-faceted diamond crystals were grown uniformly in the center areas of the diamond films. Higher incident laser powers, although further promoted growth rate, suppressed the uniformity of the diamond (100) facets. Best diamond quality was obtained within a laser power density range of 5.0 × 10 3 to 6.7 × 103 W/cm2, whereas the highest energy efficiency was achieved within a laser power density range of 3.3 × 103 to 6.7 × 103 W/cm2. The effects of the resonant laser energy coupling were investigated using optical emission spectroscopy.

UR - http://www.scopus.com/inward/record.url?scp=78149353417&partnerID=8YFLogxK

U2 - 10.1021/cg1010083

DO - 10.1021/cg1010083

M3 - Article

AN - SCOPUS:78149353417

SN - 1528-7483

VL - 10

SP - 4928

EP - 4933

JO - Crystal Growth and Design

JF - Crystal Growth and Design

IS - 11

ER -

Excitations of precursor molecules by different laser powers in laser-assisted growth of diamond films

Abstract

UN SDGs

Access to Document

Other files and links

Fingerprint

Cite this